Laser radar scanning galvanometer three-dimensional angle measuring device and method

Abstract

The invention discloses a laser radar scanning galvanometer three-dimensional angle measuring device and method, and belongs to the field of angle measurement. The device comprises a laser, a collimating lens, a beam splitter prism, a scanning galvanometer, a focusing lens and a laser spot detector. The scanning galvanometer is a specially-made galvanometer with a special structure, the front surface of the scanning galvanometer is a coated reflector, and the rear surface of the scanning galvanometer is coated with a reflective diffraction grating. The collimated laser beam irradiates a reflective diffraction grating on the rear surface of the scanning galvanometer. The zero-order diffracted light beam and the positive-order diffracted light beam are reflected at different angles and transmitted through the light splitting prism and the focusing lens, and irradiating to the two laser spot detectors in parallel, and the displacements of the zero-order diffraction spots and the positive-order diffraction spots on the two laser spot detectors are calculated to obtain the deflection angles of the scanning galvanometer in three dimensions.

Description

technical field [0001] The invention relates to the field of angle measurement, in particular to a laser radar scanning vibrating mirror three-dimensional angle measurement device and method. Background technique [0002] Lidar is a laser sensing system that integrates functions such as target detection, long-range ranging, and area array imaging. It has relatively high distance and angle measurement resolution, relatively large measurement range and working distance, and excellent Anti-interference ability. In recent years, the application scenarios of lidar have gradually shifted from military use to civilian use, playing an increasingly important role in resource exploration, transportation and communication, and environmental detection. The laser radar system is mainly composed of a laser emitting system, a galvanometer scanning system, a laser receiving system and a signal processing system. The galvanometer scanning system is an important part of the laser radar syste...

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the problem of limited measurement accuracy of laser radar due to the use of contact measurement methods such as capacitive angular displacement sensors in the prior art, the present invention provides a three-dimensional angle measurement device and method for laser radar scanning galvanometer, using The special scanning galvanometer, its front surface is a coated mirror, which is used to effectively deflect the laser radar measuring laser, and its rear surface is a reflective diffraction grating

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