Low-temperature plasma multi-processing-object experiment platform and processing method thereof
A technology of low-temperature plasma and experimental platform, which is applied in the field of plasma processing platform
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Embodiment 1
[0044] Embodiment 1: Low-temperature plasma multi-processing object experiment platform, such as figure 1 As shown, it includes an air compressor 101, a condensation dryer 102, a plurality of filters 103, an explosion-proof gas cylinder cabinet 104, a high pressure pressure reducing valve 105, a tube furnace 106, a humidifier 107, a gas treatment DBD reactor 108, and a plate DBD Reactor 115, high-voltage power supply 113 and step-up transformer 114, the specification of the air compressor 101 is 750*2-50L, voltage 220V, power 1500W, 4 cylinders, speed 1400r / min, production period volume 120L / min, The working pressure is 0.5-0.8MPa; the model of the condensation dryer 102 is 7.5AC, the specification is HF-1, the inlet pressure is ≤1.02Mpa, the type of refrigerant is R-12, the overall size is 700*400*595, and the gas handling capacity is 1.5m3 / min, supporting air compressor 101 power 1.5KW-7.5KW; the model of the filter 103 is 001-CAT, the inlet and outlet are 1 inch, the inlet...
Embodiment 2
[0046] Embodiment 2: on the basis of embodiment 1, as Figure 3-4 As shown, including frame body 1, frame body 1 two ends are symmetrically provided with fixed plate 2, and described fixed plate 2 is provided with a plurality of fixed covers 3; Frame body 1 of the present invention, fixed plate 2, fixed cover 3 are all Metal material, a DBD single tube 4 is arranged between the fixed covers 3 corresponding to the two ends of the frame body 1, such as Figure 5As shown, the DBD single tube 4 includes a sleeve-shaped barrier medium layer 5 arranged between the fixed covers 3, the outer wall of the barrier medium layer 5 is sleeved with an external electrode 6, and the middle part of the barrier medium layer 5 is provided with The end is fixed on the inner electrode 7 on the fixed cover 3, and the gap between the inner electrode 7 and the barrier medium layer 5 forms a flow channel 8, and the gas in the flow channel 8 is purified under the negative ions generated by the blocking ...
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