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Multi-chamber continuous optical coating machine

An optical coating machine, coating machine technology, applied in the direction of sputtering coating, vacuum evaporation coating, ion implantation coating, etc., can solve the problem of large error, to reduce the time of vacuuming, high degree of automation, improve coating The effect of work efficiency

Active Publication Date: 2020-12-15
XIANGTAN HONGDA VACUUM TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Later, a vertical coating machine appeared, which uses a vertical sputtering target for sputtering deposition, and the probe is changed to extend into the furnace and close to the workpiece, and is installed on the side at a fixed position to monitor the film thickness. The thickness information represents the film thickness of the moving workpiece in the whole furnace. This method also has the problem of large errors.

Method used

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  • Multi-chamber continuous optical coating machine

Examples

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Effect test

Embodiment 1

[0040] Figure 1 to Figure 4 The first embodiment of the multi-chamber continuous optical coating machine of the present invention is shown. In this embodiment, the workpiece turret 4 can only revolve, but cannot rotate.

[0041] In this embodiment, the coating machine includes a running mechanism, at least one transfer unit, at least one antechamber 2, and at least one coating chamber 3, and the coating piece is arranged on a workpiece turret 4, and the transfer unit and the antechamber 2 The front chamber 2 is connected with the coating chamber 3, the transfer part on one side, the front chamber 2 and the coating chamber 3 form a coating channel for the plated parts, and the front chamber 2 and the other transfer part on the other side form a film outlet aisle. The front chamber 2 and the coating chamber 3 are provided with a vacuum device 5 independently, and the front chamber 2 and the coating chamber 3 are separate sealed chambers, and the workpiece turret 4 rotates in t...

Embodiment 2

[0056] Figure 4 The second embodiment of the multi-chamber continuous optical coating machine of the present invention is shown. In this embodiment, the structure of the transmission part, the front chamber, and the preparation part is the same as that of Embodiment 1, the difference is that the workpiece turret 4 can revolve and rotate, The running mechanism is provided with an autorotation assembly 9 .

[0057] In this embodiment, the workpiece turret 4 includes a top plate 41, a bottom plate 42, a plurality of rotation frames, and a plurality of rotation shafts 44. The rotation shafts 44 are arranged between the top plate 41 and the bottom plate 42 and arranged along the circumferential direction. Each rotation frame is installed on an axis of rotation 44 . Bearings are provided at the connection between the rotation shaft 44 and the top plate 41 and the bottom plate 42 , and the rotation frame is evenly arranged along the circumference of the top plate 41 and the bottom ...

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Abstract

The invention discloses a multi-chamber continuous optical coating machine. The multi-chamber continuous optical coating machine comprises an operating mechanism, at least one transfer part, at leastone front chamber and at least one coating chamber. A plating part is arranged on a workpiece rotating rack, the transfer part is joined to the front chamber, the front chamber is joined to the coating chamber, the transfer part, the front chamber and the coating chamber form a coating channel of the plating part, the front chamber and the coating chamber are provided with vacuum equipment independently, the front chamber and the coating chamber are independent sealing cavities, and the workpiece rotating rack rotates in the coating chamber through the operating mechanism. The invention provides the multi-chamber continuous optical coating machine which improves the coating efficiency and saves the energy sources, and the coated plating part is uniform in film thickness.

Description

technical field [0001] The invention relates to the technical field of optical coating, in particular to a multi-chamber continuous optical coating machine. Background technique [0002] Optical coating technology is widely used in all walks of life, from precision optical equipment, display equipment to optical film applications in daily life, such as glasses, digital cameras, various household appliances, or anti-counterfeiting technology on banknotes , can be called the application of optical thin film technology or its technical extension. If there is no optical thin film technology as the basis for development, modern photoelectric, communication or laser technology will not be able to progress, which shows the importance of research and development of optical thin film technology. [0003] Generally speaking, when using multi-layer thin films, it is necessary to use high and low refractive index thin film stacking technology for the design of various types of optical ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C14/24C23C14/34C23C14/50C23C14/54
CPCC23C14/568C23C14/24C23C14/34C23C14/505C23C14/546
Inventor 孙桂红祝海生梁红陈立唐莲唐洪波
Owner XIANGTAN HONGDA VACUUM TECH CO LTD
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