An Informatics Computational Lithography Method
A technology of computational lithography and informatics, applied in the field of computational lithography of informatics, can solve the problems of unclear information transmission mechanism of lithography layout, and the theoretical limit of imaging accuracy of lithography system is not yet clear, so as to achieve the effect of improving convergence accuracy
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[0115] Figure 4 401 in the figure is a circular light source, 402 is the target pattern 1, and 403 is the lithographic imaging obtained by irradiating the mask in 402 with the light source 401, and the imaging error is PE=6387. Taking a computational lithography method commonly used at present, that is, the SMO algorithm as an example, the light sources and masks in 401 and 402 are optimized using the SMO method. 406 is the lithographic imaging obtained by irradiating the mask in 405 with the light source in 404, and the imaging error is PE=1540.
[0116] Figure 5 501 is the circular light source, 502 is the target pattern 2, and 503 is the lithography image obtained by irradiating the mask in 502 with the light source in 501, and the imaging error is PE=3454. The light source and the mask in 501 and 502 are optimized by using the SMO method, and the obtained optimized light source is shown in 504 , and the optimized mask is shown in 505 . 506 is the lithographic imaging ...
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