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Area array infrared spectrum sensor with small photosensitive element structure, and application method of area array infrared spectrum sensor

A technology of infrared spectroscopy and photosensitive elements, which is applied in the field of infrared spectral sensor design based on diamond-shaped small photosensitive element arrays, can solve the inability to effectively improve the resolution performance of spectrometers, the performance limitations of linear gradient filters, and the adverse effects of key characteristic wavelengths, etc. problems, to avoid adverse effects, reduce the overlapping degree of spectral lines, and reduce the center wavelength interval

Pending Publication Date: 2020-12-25
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the resolution of this kind of spectrometer at this stage is generally limited by the performance of the linear gradient filter, and its full width at half maximum is generally greater than 1% of the peak center wavelength. Simply switching to a larger-scale focal plane array will introduce serious inter-pixel The overlapping of spectral lines cannot effectively improve the resolution performance of the spectrometer
In addition, most of the current research and instruments use a single-row detector line array coupled with a filter, which is very easy to cause adverse effects on the key characteristic wavelengths of the spectral curve due to the blind element or abnormal response of a single detector

Method used

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  • Area array infrared spectrum sensor with small photosensitive element structure, and application method of area array infrared spectrum sensor
  • Area array infrared spectrum sensor with small photosensitive element structure, and application method of area array infrared spectrum sensor
  • Area array infrared spectrum sensor with small photosensitive element structure, and application method of area array infrared spectrum sensor

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Embodiment Construction

[0022] The implementation of the present invention will be described in more detail below in conjunction with the accompanying drawings.

[0023] Such as figure 1 As shown, an area array infrared spectrum sensor with a small photosensitive element structure includes a linear gradient filter, an area array infrared photosensitive chip, and a signal processing integrated circuit.

[0024] The linear gradient filter can use a short-wave infrared linear gradient filter with a wavelength range of 900-1700nm, a size of 15mm×3mm×0.1mm, and a measured effective length of about 13mm. The resolution of the linear gradient filter is 14-20nm, which increases slowly with the central wavelength of the transmittance, which is about 1%-1.5% of the central wavelength. The area array infrared photosensitive chip selects the InGaAs array with a scale of 640×512, the pixel size is 25μm×25μm, and the wavelength range is 900-1700nm, which matches the linear gradient filter. The signal processing ...

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Abstract

The invention discloses an area array infrared spectrum sensor with a small photosensitive element structure, and an application method of the area array infrared spectrum sensor. The sensor comprisesa linear gradual filter, an area array infrared photosensitive chip and a signal processing integrated circuit; and an area array photosensitive chip of a square small-size photosensitive element structure is adopted and coupled with the linear gradual filter after being rotated by 45 degrees, and a rhombus small photosensitive element structure with the diagonal line consistent with the gradualchange direction of the wavelength is obtained. According to the application method, a plurality of adjacently-arranged photosensitive element columns of the sensor are combined to serve as a spectrumchannel, a column of photosensitive elements are reserved between every two adjacent spectrum channels to serve as an interval, photosensitive element composition of the spectrum channels is changedthrough translation, measurement is conducted multiple times, and a plurality of sets of spectrum data are fused to form a spectrum curve. Compared with the mode that a single large photosensitive element serves as a spectrum channel, the spectrum channels are flexible and variable, the wavelength intervals and spectral line overlapping between the spectrum channels can be effectively reduced, andmore spectrum characteristic details can be extracted advantageously.

Description

technical field [0001] The invention relates to the field of infrared spectrum sensors, and relates to a design and application method of an infrared spectrum sensor based on a diamond-shaped small photosensitive element array. Background technique [0002] The commercial expansion of infrared spectroscopic analysis technology puts forward the miniaturization application requirements for its analysis equipment. According to the spectroscopic method of the instrument, infrared spectrometers can be roughly divided into grating type, filter type, Fourier transform type and acousto-optic tunable filter type. Fourier transform spectrometers have high technical complexity and cost, and contain moving parts, which have certain requirements for the use environment, so they are not widely used in portable near-infrared spectroscopy applications. Grating spectrometer is currently the design scheme adopted by most portable infrared spectrometers, and its resolution performance is very...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J3/28
CPCG01J3/2803
Inventor 王绪泉黄松垒张永刚柯鹏瑜刘梦璇方家熊
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI