Micro-ring coupling modulation structure based on graphene fine tuning coupling efficiency and use method thereof
A technology of coupling efficiency and coupling structure, applied in the field of optoelectronics, can solve the problems of limited, non-tunable, and inability of micro-ring coupling efficiency, and achieve the effect of reduced process tolerance requirements and high precision
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Embodiment 1
[0039] like figure 1 As shown, a microring coupling modulation structure based on graphene fine-tuning coupling efficiency, specifically includes a microring waveguide structure 9, a signal modulation structure 1, a phase modulation structure 2, and a modulation coupling structure 3, and the entire microring coupling modulation structure is fixed on the substrate 8 on.
[0040] The microring waveguide structure 9 includes two 1 / 2 arc waveguides 10, the upper straight waveguide 12 and the lower straight waveguide 11, the microring waveguide structure 9 is a racetrack structure, and the upper straight waveguide 12 area integrates the signal modulation structure 1 With the phase modulation structure 2, a certain distance is fixed between the lower part of the straight waveguide 11 and the modulation coupling structure 3.
[0041] Graphene is a honeycomb-shaped two-dimensional hexagonal carbon structure material. It is a new type of material. Under the action of an applied voltage,...
Embodiment 2
[0056] Add a bias voltage to the graphene 15 in the phase modulation structure 2, pre-adjust the chemical potential to 0.8eV, and determine the working wavelength of this modulation structure to be 1.548 μm, such as Figure 4 As shown, after the working wavelength is determined, the bias voltage of the graphene 13 in the modulation coupling structure 3 is further adjusted to achieve high-precision regulation of the coupling efficiency.
[0057] Figure 5 It is the relationship between the coupling efficiency and the coupling length of the modulation coupling structure 3 when the working wavelength is 1.548 μm and the coupling spacing is 300 nm. It can be seen from the figure that when the coupling length is 10 μm, the coupling efficiency is 0.9422, which is close to the target value (0.928) .
[0058] Figure 6 When the working wavelength is 1.548 μm and the coupling spacing is 300 nm, the coupling length is determined to be 10 μm, the relationship between the coupling effic...
Embodiment 3
[0060] Add a bias voltage to the graphene 15 in the phase modulation structure 2, pre-adjust the chemical potential to 0.8eV, and then adjust the graphene chemical potential to 0.5eV, and determine the working wavelength of this modulation structure to be 1.5455μm, such as Figure 4 As shown, after the working wavelength is determined, the bias voltage of the graphene 13 in the modulation coupling structure 3 is further adjusted to achieve high-precision regulation of the coupling efficiency.
[0061] Figure 7 is the relationship between the coupling efficiency and the coupling length of the modulation coupling structure 3 when the working wavelength is 1.5455 μm and the coupling spacing is 300 nm. It can be seen from the figure that when the coupling length is 10 μm, the coupling efficiency is 0.9368, which is close to the target value (0.928 ).
[0062] Figure 8 When the working wavelength is 1.5455 μm and the coupling spacing is 300 nm, the coupling length is determined...
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