A kind of mems sensor system and using method thereof

Abstract

The invention discloses a MEMS sensor system, which includes: a MEMS sensor, which includes: an upper pole plate, a middle pole plate and a lower pole plate; a preamplifier is used to convert the electric charge output by the MEMS sensor into an analog voltage signal output ; The preamplifier includes an operational amplifier and a feedback capacitor; the first end of the compensation capacitor is electrically connected to the middle plate, and the second end is connected to the common mode voltage to store part of the charge of the MEM sensor; the analog-to-digital converter is used for Convert the analog voltage signal into a digital voltage signal output; the digital signal processor is used to perform noise suppression processing on the digital voltage signal output by the analog-to-digital converter, and generate a timing signal according to the digital voltage signal after the noise suppression processing, and output the timing signal ; The pulse generator is used to generate a pulse signal according to the timing signal to drive the MEMS sensor to work. The invention can effectively improve the noise performance of the MEMS sensor, reduce system power consumption and improve system precision.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a MEMS sensor system and an application method thereof. Background technique [0002] Most of the existing MEMS (Micro Electro Mechanical Systems, micro-electromechanical systems) sensor architectures are implemented with switched capacitor circuits, which have many switching states, and MEMS sensor systems are easily affected by switching noise, such as switching thermal noise, which limits The accuracy of MEMS sensors, such as applications with an accuracy of 10ng / rt(Hz), etc. In applications such as seismic exploration, high-precision MEMS sensors are required, and sensors with switched capacitor circuit structures cannot meet the requirements. [0003] In some existing technical solutions, there is also a single power supply system, and the reference voltage of the readout circuit is also a single voltage, such as 5V. If the input terminal of the operational amplifier is gro...

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Problems solved by technology

[0002] Most of the existing MEMS (Micro Electro Mechanical Systems, micro-electromechanical systems) sensor architectures are implemented with switched capacitor circuits, which have many switching states, and MEMS sensor systems are easily affected by switching noise, such as switching thermal noise, which limits The accuracy of MEMS sensors, such as applications with an accuracy of 10ng / rt(Hz), etc.

In applications such as seismic exploration, high-precision MEMS sensors are required, and sensors with switched capacitor circuit structures cannot meet the requirements

[0003] In some existing technical solutions, there is also a single power supply system, and the reference voltage of the readout circuit is also a single voltage, such as 5V. If the input terminal of the operational amplifier is grounded (or 0V), since the MEMS sensor is directly connected to the readout circuit, Due to the amplification effect of the readout circuit, its output voltage is close to the power supply voltage, that is, 5V, and the traditional circuit structure is easy to saturate

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