Resistance type micro-mechanical air pressure sensor and preparation method thereof

A technology of air pressure sensor and resistance, which is applied in the field of sensors, can solve problems such as the limit of sensor sensitivity improvement, the decrease of structural stability and reliability, and the difficulty of sensor design, so as to avoid reliability and stability problems, easy to control, and design The effect of high flexibility

Inactive Publication Date: 2021-01-22
NANJING GAOHUA TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Regardless of the structure, due to the nonlinear characteristics of the material under high stress and the plastic deformation beyond the elastic region, there is a limit to the improvement of the sensitivity of the sensor.

Method used

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  • Resistance type micro-mechanical air pressure sensor and preparation method thereof
  • Resistance type micro-mechanical air pressure sensor and preparation method thereof
  • Resistance type micro-mechanical air pressure sensor and preparation method thereof

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Embodiment Construction

[0034] In order to enable those skilled in the art to better understand the technical solution of the present disclosure, the present disclosure will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0035] Such as figure 1 As shown, one aspect of the present disclosure relates to a resistive micromechanical air pressure sensor, including a substrate, a conductive medium 11 , a first sensitive resistor 2 and a second sensitive resistor 6 . The substrate may be made of silicon material, silicon nitride material, etc., which is not limited in the embodiments of the present disclosure. A gas cavity 9 and a gas transmission channel 10 are arranged in the substrate, and the gas transmission channel 10 communicates the gas cavity 9 with the outside. That is, if figure 1 As mentioned above, the left end of the gas transmission channel 10 communicates with the gas chamber 9 , and the right end of the gas transmission chann...

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Abstract

The invention provides a resistance type micro-mechanical air pressure sensor and a preparation method thereof. The resistance type micro-mechanical air pressure sensor comprises: a substrate providedwith a gas cavity and a gas transmission channel, wherein the gas transmission channel communicates the gas cavity with the outside; an electric conducting medium movably arranged in the gas transmission channel; a first sensitive resistor and a second sensitive resistor oppositely arranged in the substrate at an interval, wherein the gas transmission channel is arranged between the first sensitive resistor and the second sensitive resistor, and when the air pressure in the gas cavity is changed, the electric conducting medium can be pushed to move in the gas transmission channel, so that theelectric conducting medium is in contact with the first sensitive resistor and the second sensitive resistor at different positions. According to the invention, a deformed mechanical film is replacedby a movable electric conducting medium, so that the problems of reliability and stability caused by high stress are avoided; and the moving distance of the electric conducting medium is related to the gas volume change, the sensitivity of the sensor can be effectively improved by designing the sizes of the gas cavity and the gas transmission channel, the design flexibility is high, and control is easy.

Description

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Claims

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Application Information

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Owner NANJING GAOHUA TECH
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