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A kind of laser direct writing imaging correction method, device, equipment and storage medium

A laser direct writing and imaging technology, which is used in optomechanical equipment, microlithography exposure equipment, photolithography process exposure devices, etc., to achieve the effect of reducing labor costs and equipment costs

Active Publication Date: 2021-06-01
GIS TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

From a microscopic point of view, there is a phenomenon of bending and deflection in the moving guide rail, so that the stage relying on the guide rail also has a corresponding motion deflection during the movement process. When the deflection exceeds the allowable range of the equipment error, the products produced by the equipment will be out of order. Are defective

Method used

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  • A kind of laser direct writing imaging correction method, device, equipment and storage medium
  • A kind of laser direct writing imaging correction method, device, equipment and storage medium
  • A kind of laser direct writing imaging correction method, device, equipment and storage medium

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Embodiment 1

[0062] figure 2A flow chart of a laser direct writing imaging correction method provided in Embodiment 1 of the present invention. This embodiment is applicable to the case of correcting laser direct writing imaging. The method can be performed by a laser direct writing imaging correction device. It can be composed of hardware and / or software, and generally can be integrated into a device with laser direct writing image correction function, which can be an electronic device such as a server or a server cluster. Such as figure 2 As shown, it specifically includes the following steps:

[0063] Step 210, acquiring the first ordinate of each recognizable figure on the calibration board.

[0064] Wherein, the calibration board is a reference measurement board, on which several identifiable figures are designed; the identifiable figures are any identifiable regular figures. The identifiable graphics are arranged according to certain rules on the calibration board, for example, ...

Embodiment 2

[0084] Figure 5 It is a schematic structural diagram of a laser direct writing imaging correction device provided in Embodiment 2 of the present invention. Such as Figure 5 As shown, the device includes: a first ordinate acquisition module 510 , a second ordinate acquisition module 520 , a difference judgment module 530 , a physical length adjustment module 540 , a return execution module 550 , and a working parameter determination module 560 .

[0085] The first ordinate acquisition module 510 is configured to acquire the first ordinate of each recognizable figure on the calibration plate.

[0086] Optionally, the first ordinate acquisition module 510 is further configured to: use the measurement camera CCD on the LDI device to measure the first ordinate of each recognizable figure on the calibration plate; and store the first ordinate.

[0087] The second ordinate acquisition module 520 is used for exposing recognizable patterns on the substrate with photosensitive mater...

Embodiment 3

[0097] Image 6 It is a schematic structural diagram of a computer device provided by Embodiment 3 of the present invention. Image 6 A block diagram of a computer device 612 suitable for implementing embodiments of the invention is shown. Image 6 The computer device 612 shown is only an example, and should not impose any limitation on the functions and scope of use of the embodiments of the present invention. Device 612 is a typical laser direct writing imaging correction computing device.

[0098] Such as Image 6 As shown, computer device 612 takes the form of a general-purpose computing device. Components of computer device 612 may include, but are not limited to: one or more processors 616, storage 628, bus 618 connecting various system components including storage 628 and processor 616.

[0099] Bus 618 represents one or more of several types of bus structures, including a memory bus or memory controller, a peripheral bus, an accelerated graphics port, a processor, ...

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Abstract

The embodiment of the present invention discloses a laser direct writing imaging correction method, including: obtaining the first ordinate of each recognizable figure on the calibration plate; using laser direct writing imaging LDI equipment to expose the recognizable figure to the surface attached with a photosensitive material on the substrate, and obtain the second ordinate of each recognizable pattern exposed on the substrate; calculate the difference between the first ordinate and the second ordinate, and judge whether the difference is less than the set threshold; if not, then according to The difference adjusts the physical length of the pattern exposure trigger signal; based on the physical length, the return execution adopts the laser direct writing imaging device to expose the identifiable pattern to the substrate with the photosensitive material, and obtains the second longitudinal image of each identifiable pattern exposed on the substrate. Coordinate operation until the difference is less than the set threshold; the adjusted physical length is determined as the working parameter of the laser direct writing imaging device. The laser direct writing imaging correction method provided by the embodiment of the present invention can achieve the purpose of reducing labor cost and equipment cost.

Description

technical field [0001] The invention relates to the field of laser direct writing imaging, in particular to a laser direct writing imaging correction method, device, equipment and storage medium. Background technique [0002] Laser Direct Imaging (LDI) equipment is a photolithographic exposure equipment that does not need to use a photomask, but moves the light source based on digital data such as input pixel patterns, and directly scans the light on the photosensitive combination through the light source. On the object, form a pattern. The light source is usually a semiconductor laser, a gas laser, etc., and the movement of the light source is driven by a motion mechanism. [0003] The motion mechanism of laser direct writing imaging (LDI) equipment is a high-precision motion mechanism, and it is impossible to achieve absolute straightness in the actual equipment production process. From a microscopic point of view, there is a phenomenon of bending and deflection in the m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
CPCG03F7/2053G03F7/704G03F7/7055G03F7/70616
Inventor 陈国军吴景舟马迪
Owner GIS TECH INC