Insulated gate bipolar transistor and manufacturing method thereof
A technology of bipolar transistor and manufacturing method, applied in transistor, semiconductor/solid-state device manufacturing, semiconductor device and other directions, can solve the problem of not increasing off-time, etc., achieve low on-voltage drop and off-time, and enhance conductance Modulation effect, the effect of increasing the difference
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[0096] Figure 7 A schematic structural diagram of an insulated gate bipolar transistor is shown. The insulated gate bipolar transistor includes: collector metal 0, P+ collector region 1, N-type main drift region 2, N+ type doped region 3, N-type transfer region 4, P-type body region 5, N+ emitter Pole region 6, emitter metal 7, gate layer 8, gate metal 9. Wherein, a positive sign (+) indicates a higher doping concentration, and a negative sign (-) indicates a lower doping concentration.
[0097] In this example, by means of ion implantation, regions with different doping concentrations are set in the drift region, that is, an N-type transfer region, an N-type main drift region, and an N+-type barrier region are formed to ensure that the lower part of the P-type body cell The N-type doping concentration of the N-type doping concentration is higher than that near the MOS channel part, which can effectively increase the recombination efficiency of holes in the drift region whe...
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