Multi-station double-chamber film plating machine

Abstract

The invention discloses a multi-station double-chamber film plating machine which comprises a first workpiece table, a second workpiece table, a circulation table, a processing chamber, a film platingchamber and a plurality of bearing frames; the second workpiece table communicates with one side of the first workpiece table, and the other side of the first workpiece table communicates with one side of the circulation table; the other side of the circulation table communicates with the processing chamber, and the side, away from the circulation table, of the processing chamber communicates with the film plating chamber; the bearing frames are used for bearing workpieces and circulates in the multi-station double-chamber film plating machine; the circulation table is used for inputting thebearing frames into the processing chamber so as to process the workpieces; and the processing chamber is used for processing the workpieces and then inputting the workpieces into the film plating chamber for film plating. The film plating machine provided by the invention is capable of realizing multi-station feeding and discharging.

Description

Technical field[0001]The invention relates to the field of vacuum coating, in particular to a multi-station dual-chamber coating machine.Background technique[0002]Vacuum coating is currently a more advanced coating technology, and the magnetron sputtering coating method in vacuum coating uses electrons to be released through the energized anode, and the electrons collide with the gas molecules in the vacuum cavity under the acceleration of the electric field, thereby making the gas molecules Ionization, and the ionized gas molecules bombard the metal particles on the cathode under the action of the electric field, so that the metal particles are ionized and sputtered, and the ionized metal ions are deposited on the surface of the workpiece to form a thin film. In order to make the electrons more efficient The gas molecules collide to increase the ionization rate of gas molecules. A magnet is installed inside the cathode to form a magnetron cathode. Therefore, under the combined acti...

AI Technical Summary

Problems solved by technology

However, the existing coating machines often only have one station for loading, unloading and post-processing of workpieces. Therefore, when the number of workpieces to be coated is large, it is easy to cause accumulation of workpieces and reduce the coating efficiency of workpieces.

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