A device and method for measuring the interaction between macroscopic interfaces

Abstract

The invention discloses a device and a method for measuring the interaction between macro interfaces. The device includes a mechanical sensing module, a spatial displacement module, a preamplifier module, a signal generation and demodulation module, and a control module. The mechanical sensing module is fixed on the spatial displacement module as a probe; the input terminal of the mechanical sensing module is connected to the The signal generation is connected to the demodulation module, and its output is connected to the preamplification module; the preamplification module is connected to the signal generation and demodulation module; the spatial displacement module is connected to the control module, the signal generation and demodulation module; the mechanical sensor The module includes a quartz piezoelectric vibrator, and one end of the quartz piezoelectric vibrator is fixed with a submillimeter or millimeter-scale microstructure. The mechanical measurement accuracy of the invention can reach the level of piconewtons, and can be applied to the precise detection of the interaction between micro-nano-scale to millimeter-scale structure interfaces.

Description

technical field [0001] The invention relates to the technical field of interaction measurement between interfaces, in particular to an accurate measurement device and method for interaction between macroscopic interfaces. Background technique [0002] In recent years, due to the development of technology, the interaction between structural interfaces has received extensive attention. Interactions between micro-, nano-scale and even sub-millimeter-scale structures are ubiquitous in MEMS devices. Therefore, accurate measurement of the interactions between micro-, nano-scale and even millimeter-scale structures is of great significance for the design and fabrication of MEMS devices. [0003] At present, atomic force microscopy has become the main method to measure the interaction between micro- and nano-scale structures due to its high sensitivity, simple sample preparation, and easy operation. Usually, this method is to bring the cantilever beam probe close to the sample surf...

AI Technical Summary

Problems solved by technology

This method often requires attaching the structure to a cantilever beam, but since the cantilever beam is very soft and its size is limited to tens of microns, it cannot load larger structures.

At the same time, when the cantilever beam probe approaches the sample, it will be directly adsorbed on the sample, and the accurate measurement of the interaction force cannot be realized

Therefore, it is very difficult to accurately measure the interaction between the macroscopic interfaces of submillimeter-scale or even millimeter-scale structures at micro-nano spacing.

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