Meltallizing method of ceramic part for dry etching process

A technology of dry etching and ceramic parts, applied in the field of TFT-LCD manufacturing, can solve the problems of cost burden and high production cost, and achieve the effects of prolonging service life, improving corrosion resistance and maintaining cleanliness

Inactive Publication Date: 2021-03-19
合肥微睿科技股份有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the length of such ceramic parts is usually more than 1 meter, and its thickness is about 5 cm. Because of the high production cost, frequent replacement will also bring a cost burden.

Method used

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  • Meltallizing method of ceramic part for dry etching process

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Embodiment Construction

[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0033] see figure 1 A spraying method for a ceramic part used in a dry etching process, specifically comprising the following steps:

[0034] S1. Soaking and stripping: Put the ceramic part to be sprayed into the soaking liquid to soak, and remove the coating on the surface of the ceramic part to be sprayed and the attachment on the inner wall of the assembly hole on the ceramic part to be sprayed.

[0035] Among them, ceramic parts can be applied to the dry ...

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Abstract

The invention discloses a meltallizing method of a ceramic part for a dry etching process. The meltallizing method comprises the steps of firstly, putting the ceramic part to be meltallized into a soaking solution for soaking; cleaning the ceramic part with pure water and drying; shielding the ceramic part by adopting a high-temperature-resistant shielding adhesive tape and a Teflon cap, shieldinga non-meltallizing surface, and exposing the meltallizing surface; carrying out sand blasting treatment on the meltallizing surface, and then carrying out plasma spraying on the meltallizing surface;then removing the high-temperature-resistant shielding adhesive tape and the Teflon cap which shield the ceramic part, and then carrying out secondary cleaning and drying; and finally, checking the appearance and the size of the meltallizing coating. According to the method, the meltallizing coating with the required thickness can be obtained, the corrosion resistance of the ceramic part is improved, and the service life of the ceramic part is prolonged.

Description

technical field [0001] The invention relates to the technical field of TFT-LCD (thin film transistor liquid crystal display) manufacture, in particular to a method for spraying ceramic parts used in a dry etching process. Background technique [0002] The dry etching (Dry Etch) process in the TFT-LCD (Thin Film Transistor Liquid Crystal Display) manufacturing process refers to removing the metal (Mo) formed on the LCD glass substrate (LCD GLASS) by plasma etching inside the vacuum chamber , Ta, Al, ITO) and insulating film (Si, SiNx) process. [0003] Same as the upper electrode and the lower electrode, the ceramic parts installed around the lower electrode also need to be replaced regularly. The function of the ceramic parts is to protect the periphery of the lower electrode and prevent the plasma from penetrating to the bottom of the lower electrode and forming an arc. At the beginning, pure sintered ceramics were used without any coating treatment on the surface, but the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B41/87C04B41/91
CPCC04B41/87C04B41/91C04B41/5045C04B41/5031C04B41/5032C04B41/5055C04B41/5315C04B41/5323C04B41/4527
Inventor 权太植
Owner 合肥微睿科技股份有限公司
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