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Molecular pump controller

A molecular pump and controller technology, which is applied in the direction of electronic commutation motor control, control system, AC motor control, etc., can solve the problem that the molecular pump controller cannot be assembled and integrated with portable analytical instruments, so as to improve anti-interference ability and simplify auxiliary equipment. The effect of strong structure and insulation performance

Inactive Publication Date: 2021-03-26
INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem that existing molecular pump controllers cannot be assembled and integrated in portable analytical instruments, the purpose of the present invention is to provide a molecular pump controller

Method used

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  • Molecular pump controller
  • Molecular pump controller
  • Molecular pump controller

Examples

Experimental program
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Embodiment

[0042] EXAMPLES: A molecular pump controller includes a control body and a control system.

[0043] Such as Figure 1-3 As shown, the control body includes the lower end housing 1, the upper cover plate 13, the intermediate panel 17, the upper end cover 13 and the top end opening cover of the lower end housing 1, the intermediate panel 17 and the side opening cover of the lower end housing 1; the lower end The housing 1 is fixedly mounted having a drive plate 3, and the upper cover plate 13 is fixedly mounted with a control panel 15 parallel to the drive plate 3, and the drive plate 3 is connected between the drive plate 3 and the control panel 15; the upper cover 13 Wearing a wired hole 12, the control panel 15 is connected to the connecting member 11 through the outgoing hole 12 by three-phase cable 10; the drive plate 3 is fixedly mounted with DB9 interface 4, and the intermediate panel 17 is provided with DB9 interface 4 with DB9 interface 4. Fixed port 19. The control panel 15...

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Abstract

The invention discloses a molecular pump controller, which relates to the field of vacuum pump control. The controller is characterized in that the molecular pump controller comprises a lower end shell, an upper end cover plate and a middle panel, a driving plate is fixedly arranged in the lower end shell, a control plate parallel to the driving plate is fixedly arranged on the upper end cover plate, and the driving plate is connected with the control plate through at least two pin headers; a communication circuit, a state indication circuit, a temperature detection circuit, a power supply monitoring circuit, a control chip, a photoelectric isolation circuit and a hysteresis comparison circuit are all integrated and distributed on the control panel; and a power supply circuit, a PWM signalamplification circuit, an inverter circuit, a filter circuit, a virtual neutral point circuit and a voltage comparison circuit are all integrated and distributed on the driving plate. According to the invention, the layout design is carried out on the PCB, and the operation characteristics of each circuit are integrated and arranged on the corresponding PCB, so that the anti-interference capability among internal components of the controller is improved, and the auxiliary structure required for integrating various internal components is simplified.

Description

Technical field [0001] The present invention relates to the field of vacuum pump control, and more particularly, it involves a molecular pump controller. Background technique [0002] Molecular pump is a commonly used vacuum acquisition device that transmits momentum to gas molecules using high-speed rotating blades to generate directional flow in the surface of the rigid body, thereby achieving the flavoring purpose. Molecular pumps are widely used in areas that require high vacuum, such as semiconductor industries, vacuum coating industries, leak detectors, gas phase mass spectrometers, etc. [0003] The molecular pump is driven and controlled by the molecular pump controller, and they together form a molecular pump system. The molecular pump controller is a device that provides power for molecular pumps, typically with speed control, current detection, temperature detection, fault alarm and other functions. With the continuous development of vacuum applications, some portable ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05K7/20H05K5/02H05K7/14H02P6/182H02P27/08
CPCH05K7/2039H05K7/20009H05K7/14H05K5/0217H05K5/0247H02P27/085H02P6/182
Inventor 李强李建陶继忠刘广民黄小津
Owner INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS