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Getter radio frequency activation device

A technology for activating devices and getters, which is applied in the separation of electrical components, plasma, and dispersed particles, etc., can solve problems such as reduced work performance and damage, and achieve the effect of short activation time and fast inhalation rate

Inactive Publication Date: 2021-03-30
DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Long heating time and high heating temperature will easily lead to the reduction or even damage of the electronic components in the device

Method used

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  • Getter radio frequency activation device
  • Getter radio frequency activation device

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Experimental program
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Effect test

Embodiment 1

[0023] see figure 1 shown. The invention provides a radio frequency activation device for a getter, which includes a radio frequency power supply 1 , a coaxial high-voltage output line 2 , a radio frequency electrode 3 , a vacuum cavity 4 and a getter 5 .

[0024] The vacuum cavity 4 is mainly used to generate a vacuum environment. Its main body is a hollow cylinder 4b with two openings made of insulating material. The sealed lower cover 4c made of conductive material is placed with a getter 5 on the sealed lower cover 4c; a radio frequency electrode 3 is arranged on the outer wall of the middle part of the hollow cylinder 4b, and one end of the radio frequency electrode 3 passes through a coaxial high voltage output line 2 is connected to the RF voltage output terminal of the RF power supply 1, and the other end is grounded with the sealed lower cover 4c; a vacuum adapter 4d is provided on the sealed upper cover 4a.

[0025] The material of the sealed lower cover 4c used to...

Embodiment 2

[0035] The advantages of the present invention will be described below with a specific example.

[0036] figure 2 The black line and the red line in the graph represent the variation of the gas pressure in the vacuum cavity 4 when the getter 5 is activated by the traditional heating method and the radio frequency activation method respectively. The material and weight of the vacuum cavity 4 and the getter 5 used in the experiment are exactly the same; the electric power consumed is 243W when the heating method is used, and 200W when the radio frequency method is used.

[0037]For the heating method, the stage where the pressure change is relatively stable from 0s to 80s is the activation process of the getter under the heating method, so the activation time is 80s; for the radio frequency method, the period from 5s to 20s The stage where the pressure change is relatively stable is the activation process of the getter in the radio frequency mode, so the activation time is 15s...

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Abstract

The invention relates to a getter radio frequency activation device. The getter radio frequency activation device comprises a radio frequency power supply, a coaxial high-voltage output line, a radiofrequency electrode, a vacuum cavity and a getter. When the device is used for activating the getter, the getter is placed in the vacuum cavity, the radio frequency power supply transmits energy to the radio frequency electrode through the coaxial high-voltage output line, the energy is coupled to gas in the vacuum cavity to generate plasma, and the energy is coupled to the getter to achieve activation of the getter. Compared with a conventional heating activation mode of the getter, the device has the advantages that the getter activation time is short, and the getter has a higher getter rateafter being activated.

Description

technical field [0001] The invention relates to a getter activation device, in particular to a radio frequency activation device for a getter. Background technique [0002] High vacuum and ultra-high vacuum are widely used in the fields of microelectronics, basic physics, surface science, synchrotron radiation light source and other large scientific devices and semiconductor industry. In order to obtain a high vacuum, people usually use devices such as mechanical pumps, molecular pumps, and cryopumps to pump out the gas in the system to generate a vacuum. However, for many devices, in many cases, we hope to maintain a high vacuum inside them, and do not want them to be connected with mechanical pumps, molecular pumps, and cryopumps all the time, so as to reduce the volume and weight during the process. For this reason, people often adopt the way of adding getter in the device to maintain the vacuum in the device. [0003] Currently, getters applied to a device to maintain ...

Claims

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Application Information

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IPC IPC(8): H05H1/46B01D53/02
CPCB01D53/02H05H1/46
Inventor 石文波杨亮刘本康李庆伟耿自才周灿华李永钊回晓康金玉奇
Owner DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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