An algan-based deep ultraviolet LED with superlattice quantum barriers of different aluminum compositions
A quantum barrier and superlattice technology, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of high mobility, decreased radiation recombination rate, difficult doping of p-AlGaN, etc., to improve radiation recombination efficiency, improve Electron injection and hole leakage suppression effect
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[0041] The specific implementation of the present invention will be further described below in conjunction with examples, but the implementation and protection of the present invention are not limited thereto. It should be pointed out that, if there are any processes in the following that are not specifically described in detail, those skilled in the art can realize or understand with reference to the prior art.
[0042] figure 1 It is the structural diagram of the AlGaN-based deep-ultraviolet LED with superlattice quantum barriers of different aluminum compositions provided in the embodiment.
[0043] A deep ultraviolet LED based on AlGaN superlattice quantum barriers with different aluminum components, which consists of a substrate 1, an N-type electronic layer 2, a superlattice quantum barrier active region 3, and an electron blocking layer 4 from bottom to top. 1. The P-type hole layer 5 and the contact layer 6 are stacked and formed; the n-type ohmic electrode 8 is drawn...
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