Catadioptric multi-optical axis coaxiality dynamic detection device and detection method
A dynamic detection and multi-optical axis technology, which is applied in the direction of measuring devices, optical devices, devices for controlling laser output parameters, etc., can solve problems such as increased optical power of the outgoing laser beam, time difference, and inability to monitor information and feed back to the correction mechanism. , to achieve the effect of increasing the energy density
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[0027] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings.
[0028] Such as figure 1 As shown, the catadioptric multi-optical axis coaxiality dynamic detection device includes a window 1, a parabolic mirror 2, a deflection mirror 3, a collimator lens 4, an electronically controlled attenuation film 5, an energy beam splitter 6, and a Polarizer one 7, P&S light pupil detection camera 8, energy beam splitter two 9, polarizer two 10, focusing lens one 11, P&S light optical axis detection camera 12, 1 / 4 wave plate 13, 1 / 2 wave plate 14. Polarization beam splitter 15, focusing lens 2 16, P light optical axis detection camera 17, mirror 18, focusing lens 3 19 and S light optical axis detection camera 20.
[0029] Window 1, parabolic mirror 2, deflection mirror 3, and collimator lens 4 form a secondary beam reduction system; collimator lens 4, electronically controlled attenuation film 5, energ...
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