Device and method for measuring thickness distribution of gas condensation film in moderator component

Abstract

The invention discloses a device and method for measuring the thickness distribution of a gas condensation film in a moderator component. The method includes: (1) before the film is condensed, a mobile control module images the surface of a substrate onto a detector; (2) collects an interferogram and uses a mobile Phase algorithm to obtain the overall substrate phase distribution and system error distribution; (3) After the condensation film is formed, the mobile control module aligns the detector imaging position with the highest position surface of the film; (4) Use the phase shift algorithm to obtain the interferogram to calculate the corresponding Phase information, and further obtain the phase distribution of the condensed film region including the influence of multi-beam interference; (5) use modeling technology to calculate the correction function relationship between the film multi-beam interference phase and the theoretical phase of the measurement light passing through the film without multi-beam interference, and Further calculate and correct the measured phase; (6) Calculate and obtain the film thickness distribution. The invention can realize the non-contact, rapid and high-precision measurement of the thickness of the gas condensation film of the moderator component.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement, and in particular relates to a device and method for measuring the thickness distribution of a gas condensation film of a moderator component. Background technique [0002] Muon science has come a long way since their discovery in 1936 during observations of cosmic rays. In recent years, low-energy muons (LE-u + ) has opened up a new field of muon basic and applied discipline research. For example, by using LE -u + As a microprobe, the local magnetic field in thin films, multilayer structures or surfaces can be studied, and by changing its energy, different depths can be probed. [0003] In generating LE-u + Among the various methods, the most effective, simple and effective method is to moderate the high-energy muon beam. After the high-energy muon beam generated by the neutron source passes through the moderator component composed of cold substrate foil and van der Wa...

AI Technical Summary

Problems solved by technology

However, the working distance of the microscope, the core component of the measurement optical system, is relatively short, and the lens needs to be close to the film to be measured, which is difficult to achieve in vacuum and low temperature chambers due to structural reasons.

In addition, due to the small field of view of the microscope, to achieve 50mm area distribution measurement, it takes a long time to measure, the measurement efficiency is extremely low, and the stitching process of different fields of view will also introduce stitching errors

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