Using stochastic failure metrics in semiconductor manufacturing

一种随机故障、半导体的技术，应用在半导体/固态器件制造、半导体/固态器件测试/测量、测量装置等方向，能够解决无法适时方式涵盖关键特征、未考虑设计等问题

Pending Publication Date: 2021-04-23
KLA CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Offline analysis based on SEM images is often not yet able to cover a large number of key features in a timely manner
Prior art did not take design into account when determining random failures

Method used

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  • Using stochastic failure metrics in semiconductor manufacturing
  • Using stochastic failure metrics in semiconductor manufacturing
  • Using stochastic failure metrics in semiconductor manufacturing

Examples

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Embodiment Construction

[0036] While claimed subject matter will be described in terms of particular embodiments, other embodiments, including embodiments that do not provide all of the benefits and features set forth herein, are also within the scope of the disclosure. Various structural, logical, process step and electrical changes may be made without departing from the scope of the present invention. Accordingly, the scope of the invention is defined only by reference to the appended claims.

[0037] Embodiments disclosed herein use integrated circuit (IC) design files to guide verification. IC design files can be used for analysis to perform optical and / or e-beam inspection to output random failure metrics of the semiconductor manufacturing process. IC design files can also be used to provide direct output from inspection systems or yield management software.

[0038]In order to obtain a reasonable random failure rate for a given feature with statistical significance, a large area test is usual...

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Abstract

A stochastic calculation engine receives inputs from a semiconductor inspection tool or semiconductor review tool. The stochastic calculation engine determines abnormal locations and pattern variation from the inputs and determines stochastic failures from the inputs. An electronic data storage unit connected with the stochastic calculation engine can include a database with known stochastic behavior and known process metrology variations. The stochastic calculation engine can flag stochastic features, determine a failure rate, or determine fail probability.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to assigned US Provisional Patent Application No. 62 / 728,708, filed September 7, 2018, the disclosure of which is hereby incorporated by reference. technical field [0003] The present invention relates to semiconductor inspection and metrology. Background technique [0004] The evolution of the semiconductor manufacturing industry puts forward higher requirements for yield management and, specifically, metrology and inspection systems. Critical dimensions continue to shrink, and the industry needs to reduce the time it takes to achieve high-yield, high-value production. Minimizing the total time from detection of a yield issue to resolution of said issue determines the return on investment of the semiconductor manufacturer. [0005] Fabrication of semiconductor devices, such as logic and memory devices, typically involves processing semiconductor wafers using extensive fabrication p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L21/66
CPCG06T2207/30148G06T2207/10061G06T7/0004G06T2207/20084H01L22/20H01L22/12H01L21/67242H01L22/30H01L22/26H01L22/22H01L22/10G01N21/9501
Inventor W-S·R·李恩K·沙赫A·帕克A·克罗斯
Owner KLA CORP
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