Using stochastic failure metrics in semiconductor manufacturing

Abstract

A stochastic calculation engine receives inputs from a semiconductor inspection tool or semiconductor review tool. The stochastic calculation engine determines abnormal locations and pattern variation from the inputs and determines stochastic failures from the inputs. An electronic data storage unit connected with the stochastic calculation engine can include a database with known stochastic behavior and known process metrology variations. The stochastic calculation engine can flag stochastic features, determine a failure rate, or determine fail probability.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to assigned US Provisional Patent Application No. 62 / 728,708, filed September 7, 2018, the disclosure of which is hereby incorporated by reference. technical field [0003] The present invention relates to semiconductor inspection and metrology. Background technique [0004] The evolution of the semiconductor manufacturing industry puts forward higher requirements for yield management and, specifically, metrology and inspection systems. Critical dimensions continue to shrink, and the industry needs to reduce the time it takes to achieve high-yield, high-value production. Minimizing the total time from detection of a yield issue to resolution of said issue determines the return on investment of the semiconductor manufacturer. [0005] Fabrication of semiconductor devices, such as logic and memory devices, typically involves processing semiconductor wafers using extensive fabrication p...

AI Technical Summary

Problems solved by technology

Offline analysis based on SEM images is often not yet able to cover a large number of key features in a timely manner

Prior art did not take design into account when determining random failures

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