Prolonged life laser chamber electrode and laser having same

Abstract

Disclosed is an electrode for a laser chamber, the electrode comprising an alloy of a first metal having a first free energy of formation with fluorine greater than or equal to the free energy of formation with fluorine of copper, and a second metal having a second free energy of formation with fluorine less than the first free energy.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to U.S. Application Serial No. 62 / 733708, filed September 20, 2018, the entire contents of which are incorporated herein by reference. technical field [0003] The subject matter of the present disclosure relates to light sources such as those produced by lasers used in integrated circuit lithographic fabrication processes. Background technique [0004] In laser discharge chambers, such as ArF power ring amplifier excimer discharge chambers ("PRA") or KrF excimer discharge chambers, electrode erosion imposes a significant limitation on the lifetime of the chamber modules. One measure to prolong the service life of the KrF excimer discharge chamber modules is to make the anodes out of wear-resistant materials. For example, information on materials suitable for use as anode materials can be found in U.S. Patent No. 7,301,980, issued November 27, 2007, and U.S. Patent No. 6,690,706, issu...

AI Technical Summary

Problems solved by technology

[0007] Therefore, a key issue is the chemical reaction between the electrode material and fluorine gas, which leads to the continuous formation and growth of reef-like layers, resulting in reefs preventing efficient plasma formation of the electrodes due to uneven electrode corrosion.

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