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Automatic vacuum evaporation method

A fully automated, vacuum technology, applied in the field of vapor deposition machines, can solve problems such as low production efficiency and poor coating adhesion

Inactive Publication Date: 2021-05-25
苏州佑伦真空设备科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Most of the current vacuum evaporation methods are semi-automatic, the production efficiency is low, and the adhesion of the coating film on the surface of the workpiece product is poor

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] An automatic vacuum evaporation method adopts a fully automatic vacuum evaporation machine for vacuum evaporation, comprising steps:

[0025] S1, using a rough pump to evacuate the chamber of the vacuum evaporation machine, so that the pressure in the chamber of the vacuum evaporation machine is 10pa-40pa;

[0026] S2, turn off the rough pump, and use the fine pump to continue vacuuming the chamber of the vacuum evaporation machine, so that the pressure in the chamber of the vacuum evaporation machine is 1×10 -1 Pa~1×10 -5 Pa;

[0027] S3, while S2 is evacuating, the heating lamp in the chamber of the vacuum evaporation machine starts to preheat. Under the vacuum environment, the heating lamp is heated to remove the moisture on the surface of the workpiece and increase the dryness of the surface of the coated product, thereby increasing the viscosity. Adhesion;

[0028] S4, while the heating lamp starts heating in step S3, preheat the evaporative coating material in ...

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Abstract

The invention provides an automatic vacuum evaporation method which adopts a vacuum evaporator to perform vacuum evaporation in a full-automatic manner, and comprises the following steps: S1, adopting a rough suction pump to vacuumize the interior of a cavity of the vacuum evaporator; S2, turning off the rough suction pump, and continuing to vacuumize by adopting a fine suction pump; S3, during vacuumizing in the step S2, adopting a heating lamp in a cavity of the vacuum evaporator to begin to preheat so as to remove moisture on the surface of the workpiece product; S4, preheating the evaporation coating material in a crucible while the heating lamp in the step S3 starts to heat, so that the granular evaporation coating material is fused into a whole; S5, starting an ion source device, and performing physical bombardment on the surface of the workpiece product; and S6, for the evaporation coating material fused into a whole in the crucible, changing the evaporation coating material into a liquid state from a solid state and then into a gas state by utilizing the electron beam or thermal resistance evaporation principle, enabling gas molecules of the evaporation coating material to reach the surface of the workpiece, and forming a coating film on the surface of the workpiece after solidification nodules.

Description

technical field [0001] The invention relates to the technical field of evaporation machines, and more specifically, relates to an automatic vacuum evaporation method. Background technique [0002] The vacuum evaporation machine is to evaporate the coating material (or film material) under vacuum conditions and make it gas Vaporization, and then make the gasified particles fly to the surface of the substrate and condense, and finally form a thin film. Vacuum evaporation has the advantages of simple film forming method, high film purity and density, unique film structure and performance, so it is widely used. [0003] Most of the current vacuum evaporation methods are semi-automatic, the production efficiency is low, and the adhesion of the coating on the surface of the workpiece product is poor. [0004] In view of this, the present invention provides an automatic vacuum evaporation method, which is fully automatic, has high production efficiency, and has good adhesion of t...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/30
CPCC23C14/24C23C14/30
Inventor 薛蒙晓
Owner 苏州佑伦真空设备科技有限公司
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