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Line width compensation method and device, server and storage medium

A compensation method and a compensation device technology, which are applied in instruments, special data processing applications, electrical digital data processing, etc., and can solve problems such as wiring width erosion and disconnection.

Inactive Publication Date: 2021-05-28
SHENZHEN HUADA EMPYREAN TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the CD value is smaller than the minimum line width of the exposure machine, the wiring width is eroded more seriously in the area with a small duty ratio, and the actual production width is much smaller than the design width or the problem of broken lines occurs.

Method used

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  • Line width compensation method and device, server and storage medium
  • Line width compensation method and device, server and storage medium
  • Line width compensation method and device, server and storage medium

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Embodiment Construction

[0042] Various embodiments of the invention will be described in more detail below with reference to the accompanying drawings. In the various drawings, the same elements are denoted by the same or similar reference numerals. For the sake of clarity, various parts in the drawings have not been drawn to scale. Also, some well-known parts may not be shown in the drawings.

[0043] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. In the following, many specific details of the present invention, such as structures, materials, dimensions, processes and techniques of components, are described for a clearer understanding of the present invention. However, the invention may be practiced without these specific details, as will be understood by those skilled in the art.

[0044] It should be understood that when describing the structure of a component, when a layer or ...

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PUM

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Abstract

The invention discloses a line width compensation method and device, a server and a storage medium. The line width compensation method provided by the embodiment of the invention comprises the following steps: acquiring a first wiring set, wherein at least one part of wiring in the first wiring set is to-be-compensated wiring; screening out a second wiring set from the first wiring set according to the wiring spacing; screening out a third wiring set from the second wiring set according to the wiring width; and performing width compensation on the wires in the third wire set. According to the line width compensation method and device, the server and the storage medium, the compensation efficiency is high, the compensation is accurate, and the precision is high.

Description

technical field [0001] The invention relates to the technical field of electronic design automation, in particular to a line width compensation method and device, a server and a storage medium. Background technique [0002] With the rapid development of electronic technology, the circuit integration of printed circuit boards is getting higher and higher, and the precision requirements of the circuits are also getting higher and higher. [0003] CD (critical dimension, the minimum line width in the design) compensation (Compensation) is used to compensate the wiring result after the small screen wiring. In the existing production process, the exposure and etching of the printed circuit board will cause the width of the final produced line (path) to be smaller than the designed width. This phenomenon is especially serious when the width of the line (path) is smaller than the minimum process pitch, which directly leads to a too small line width in places with a small duty cycl...

Claims

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Application Information

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IPC IPC(8): G06F30/3953G06F30/398G06F115/12
CPCG06F30/3953G06F30/398G06F2115/12
Inventor 陈增旭刘东杨祖声
Owner SHENZHEN HUADA EMPYREAN TECH CO LTD