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A droplet ejection device and related method

A technology of droplet ejection and interdigital transducer, which is applied to ejection devices, liquid ejection devices, etc., can solve the problems of inability to guarantee droplet ejection efficiency, unstable droplet ejection direction, and difficulty in droplet ejection effect, etc. Achieve the effect of ensuring droplet ejection performance, ensuring droplet ejection efficiency, and stable droplet ejection direction

Active Publication Date: 2022-05-27
HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the existence of the Rayleigh angle, the technology of using Rayleigh surface acoustic waves to realize droplet ejection in the prior art is poor in applicability. When using a single row of Rayleigh surface acoustic waves to drive the liquid, it is difficult to achieve a droplet perpendicular to the direction of the piezoelectric chip. Injection effect, the droplet injection direction is unstable, the droplet injection efficiency cannot be guaranteed, and the droplet injection performance is poor

Method used

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  • A droplet ejection device and related method
  • A droplet ejection device and related method
  • A droplet ejection device and related method

Examples

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Effect test

Embodiment 1

[0048] For a droplet ejection device provided in the first embodiment of the present disclosure, refer to figure 1 As shown, it includes: a piezoelectric chip 1, an interdigital transducer 2 arranged on the upper surface of the piezoelectric chip 1;

[0049] The ratio of the thickness of the piezoelectric chip 1 to the period of the interdigital transducer 2 is 1-3;

[0050] The interdigital transducer 1 excites surface acoustic waves and bulk acoustic waves in the piezoelectric chip under the drive of radio frequency signals, and the surface acoustic waves and the bulk acoustic waves are reflected on the upper surface 11 and the lower surface 12 of the piezoelectric chip 2 to form a composite The sound wave is used to drive the liquid to be driven on the liquid attachment area to stretch in the direction perpendicular to the surface of the piezoelectric chip to form a liquid column, so that the droplet pinch effect occurs at the end of the liquid column, and a single droplet ...

Embodiment 2

[0109] Based on the same inventive concept, an embodiment of the present disclosure further provides a method for manufacturing the droplet ejection device in the first embodiment, including:

[0110] The interdigital transducer is evaporated on a surface of the piezoelectric chip, and the ratio of the thickness of the piezoelectric chip to the period of the interdigital transducer is 1-3.

[0111] In a specific embodiment, the preparation method of the droplet ejection device may specifically include the following steps:

[0112] (1) Lithium niobate (LiNbO) in 128° Y-X direction polished on both sides 3 ) A polished surface of the piezoelectric chip 1 is vapor-deposited with an interdigital electrode metal film to obtain the interdigital transducer 2; and the ratio of the thickness h of the piezoelectric chip 1 to the period λ of the interdigital transducer 2 is 1 to 3 ;

[0113] (2) sputtering the passivation layer film 3 on the surface of the interdigital electrode 21 and...

Embodiment 3

[0127] Based on the same inventive concept, an embodiment of the present disclosure also provides a droplet ejection method using any of the droplet ejection devices described above, including:

[0128] One or more liquids to be driven are delivered to the liquid attachment area; the liquid attachment area is located on the upper surface and / or the lower surface of the piezoelectric chip 1 corresponding to the acoustic surface generated by the interdigital transducer 2 The area covered by waves propagating along the surface of the piezoelectric chip;

[0129] Load the radio frequency signal to the interdigital transducer 2, and excite the surface acoustic wave and the bulk acoustic wave in the piezoelectric chip 1. The surface acoustic wave and the bulk acoustic wave are reflected on the upper and lower surfaces of the piezoelectric chip 1 to form a composite acoustic wave, which drives the The liquid to be driven is stretched in a direction perpendicular to the surface of the...

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Abstract

The present disclosure provides a droplet ejection device and related methods. The droplet ejection device comprises: a piezoelectric chip, an interdigital transducer arranged on the upper surface of the piezoelectric chip; the ratio of the thickness of the piezoelectric chip to the period of the interdigital transducer is 1 to 3 ; The interdigital transducer excites surface acoustic waves and bulk acoustic waves in the piezoelectric chip under the drive of radio frequency signals, and the surface acoustic waves and the bulk acoustic waves are reflected on the upper and lower surfaces of the piezoelectric chip to generate recombination Acoustic waves, to drive the liquid to be driven on the liquid attachment area to stretch along the direction perpendicular to the surface of the piezoelectric chip to form a liquid column, so that the liquid column will have a droplet pinch-off effect at the end, and a single droplet will be ejected; the liquid The attachment area is located on the upper surface and / or the lower surface of the piezoelectric chip corresponding to the area covered by the propagation of the surface acoustic wave generated by the interdigital transducer along the surface of the piezoelectric chip. It solves the problems of complicated device structure, high cost, low efficiency, and inconvenient realization of on-demand injection.

Description

technical field [0001] The invention relates to the technical field of acoustic wave device microfluidics, in particular to a droplet ejection device and a related method. Background technique [0002] The droplet ejection technology of Drop on Demand (DOD) can precisely control the particle size and ejection speed of the ejected droplets according to the demand. , genetic engineering and other fields are widely used. At present, droplet ejection devices for on-demand ejection mainly include piezoelectric type, thermal bubble type, pneumatic type, mechanical type, electromagnetic type, etc. Liquid is forced out of a nozzle or orifice in droplets. [0003] In recent years, a new droplet ejection technology using surface acoustic waves to achieve droplet ejection has emerged. Among them, the most widely used droplet ejection technology based on Rayleigh SAW, Rayleigh SAW Most of the energy is confined to a wavelength range at the surface of the piezoelectric chip material a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05B17/06
CPCB05B17/0607B05B17/0653
Inventor 雷芋琳胡泓韩俊茏
Owner HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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