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Thin film pressure sensor

A thin-film pressure and sensor technology, applied in pressure sensors, sensors, instruments, etc., can solve problems affecting the range and accuracy of sensors, complicated process procedures, and the inability of MEMS sensors to achieve multiple measurements.

Active Publication Date: 2021-06-08
TACSENSE TECH (SHENZHEN) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002]Existing capsule-type manometry devices for measuring the pressure of the digestive tract, uterus or vagina generally use MEMS (English full name: Micro-Electro-Mechanical System; Chinese: microelectromechanical system) sensor for measurement, and MEMS sensor requires secondary packaging to meet biocompatibility requirements, but because of secondary packaging, the range and accuracy of sensor output are affected, the process is complicated, and the MEMS sensor Unable to achieve multiple measurements

Method used

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Embodiment Construction

[0049] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0050] Such as figure 1 , figure 2 As shown, the embodiment of the present invention discloses a capsule pressure measuring device 100 including a capsule shell 1 , a data transmission component 2 and a membrane pressure sensor 3 . Wherein, the capsule housing 1 is formed with an accommodating chamber 10, the data transmission assembly 2 is arranged in the accommodating chamber 10, the thin film pressure sensor 3 is pasted on the outer surface of the capsule housing 1, and the thin film pressure sensor 3 and the data transmission assembly 2 connected.

[0051] In the embodiment of the present a...

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Abstract

The invention relates to a thin film pressure sensor, which comprises a circuit layer consists of one or more sensing elements, a functional film layer; and a bonding layer wherein the circuit layer is attached to the functional film layer through the bonding layer. According to the thin film pressure sensor, the circuit layer, the bonding layer and the functional film layer are combined to form a capacitor, when the functional film layer is subjected to external pressure, the external pressure changes to enable the functional film layer to deform towards the circuit layer, the functional film layer makes contact with the sensing element of the circuit layer, the capacitance value of the sensing element is changed, and the pressure is represented by calibrating the corresponding relation between a capacitance value and an external pressure value; and when the external pressure disappears, the functional film layer can recover the original state, so that multiple measurements can be performed, and the film sensor is easy to perform pressure detection and has high sensitivity.

Description

technical field [0001] The invention relates to the technical field of measuring pressure, in particular to a thin film pressure sensor. Background technique [0002] Existing capsule pressure measuring devices used to measure the pressure of the digestive tract, uterus or vagina generally use MEMS (full name in English: Micro-Electro-Mechanical System; Chinese: Micro-Electro-Mechanical System) sensors for measurement, and MEMS sensors require two The secondary packaging is used to meet the requirements of biocompatibility, but because of the secondary packaging, the range and accuracy of the sensor output are affected, the process is complicated, and the MEMS sensor cannot achieve multiple measurements. Contents of the invention [0003] The application provides a thin film pressure sensor, which can realize multiple measurements. [0004] The first aspect of the present application provides a thin-film pressure sensor, the thin-film pressure sensor comprising: [0005]...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/14A61B5/03A61B5/00
CPCA61B5/036A61B5/033A61B5/6861G01L1/142A61B2562/162A61B2562/0247A61B2562/046A61B5/4222A61B1/041G01L1/146A61B1/00097A61B1/00018G01L1/225G01L1/2287
Inventor 段晓东张少邦刘雷
Owner TACSENSE TECH (SHENZHEN) CO LTD
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