High-transmittance flexible manganin meter with electromagnetic shielding function

Abstract

A high-transmittance flexible manganin meter with an electromagnetic shielding function comprises a substrate, a sensitive element and electrodes are arranged on the substrate, the input end and the output end of the sensitive element are connected with the two electrodes respectively, and packaging layers are arranged on the surfaces of the sensitive element and the electrodes; the sensitive element is made of manganese-copper foil, and the thickness is 5 microns; the electrodes and the sensitive element are of an integrated structure and are made of the same manganese-copper foil through a laser engraving or chemical corrosion process; the substrate and the packaging layers are sandwich structures, the middle layer is a PI / silver nanowire composite film with the thickness of 25 microns, the upper layer and the lower layer are ceramic films with the thickness of 1 micron, and the ceramic films are formed on the surface of the middle layer through an MEMS sputtering process; the substrate, the packaging layers, the electrodes and the sensitive element form the manganin meter through a hot-pressing packaging process. The manganin meter can shield electromagnetic radiation interference and avoid a high-voltage bypass effect, and has the characteristics of high temperature resistance, high light transmission, fast response, flexibility, thinness, suitability for micro-scale charge detonation pressure measurement and the like.

Description

technical field [0001] The invention belongs to the technical field of ultra-high pressure sensors, and in particular relates to a highly transparent flexible manganin gauge with electromagnetic shielding function. Background technique [0002] The main components of manganese-copper alloy are 83-87% copper, 11-13% manganese, and 2-4% nickel. It has the characteristics of fast response, high sensitivity, good linearity, and small temperature coefficient of resistance. No phase transition occurs. Therefore, manganin gauges made of manganese-copper alloys can measure stress above 100GPa in principle, and are widely used in pressure measurements in high-temperature and high-pressure environments such as explosive detonation, high-speed impact, dynamic fracture, and new material synthesis. [0003] With the rapid development of MEMS fuzes and MEMS pyrotechnics, the micro-scale output burst pressure test technology has become a difficult point that needs to be broken through in ...

AI Technical Summary

Problems solved by technology

[0004] At present, none of the existing manganese-copper sensors has the function of electromagnetic shielding, and the PI material used in some flexible manganese-copper sensors is light yellow, and its poor light transmission will seriously affect the alignment of sensitive components and micro-scale charges; PI materials It is not resistant to transient high temperature and has poor insulation under high pressure, which leads to a short life of the sensor under high temperature and high pressure environment; in addition, although the manganese copper sensor using ceramic materials (ceramic, mica, etc.) Transient high-temperature resistance and can avoid high-voltage bypass effects, but poor light transmission and flexibility make it unsuitable for micro-scale charge measurement, and the brittle substrate and packaging layer will also lead to short sensor life, unable to Record complete stress change history

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