Monolithic and system-level circuit integrated package structure of terahertz microstrip probe without jumper

A technology of microstrip probe and packaging structure, which is applied in the direction of circuits, connecting devices, electrical components, etc., can solve the problems of inability to guarantee repeatability and consistency, high transmission loss, etc., to save chip thinning process and reduce loss , to eliminate the effect of large discontinuities
CN112993506BActive Publication Date: 2022-07-01UNIV OF ELECTRONICS SCI & TECH OF CHINA

Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
UNIV OF ELECTRONICS SCI & TECH OF CHINA
Publication Date
2022-07-01

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Abstract

The invention discloses a terahertz jumper-free microstrip probe monolithic and system-level circuit integrated packaging structure, which is applied to the technical field of circuit packaging. The problem is that the present invention punches holes in the Pi dielectric layer above each chip pad to make a hole-shaped interconnection structure, so that the test pad is connected to the microstrip line without the traditional gold wire bonding jumper structure, and the microstrip line and the interconnection match the microstrip line. The stub connection is used to correct the impedance mismatch introduced by the hole-shaped interconnection structure. Since the hole-shaped interconnection structure and the interconnect matching microstrip stubs are made by high-precision metal atom sputtering technology, good consistency and repeatability can be guaranteed.
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Description

technical field

[0001] The invention belongs to the technical field of circuit packaging, and in particular relates to a terahertz monolithic and system-level circuit technology. Background technique

[0002] Terahertz waves in a broad sense refer to electromagnetic waves with frequencies ranging from 100GHz to 10THz (corresponding to wavelengths of 3mm to 30um). Because terahertz waves are located in the transition zone between macroelectronics and microphotonics, they have many unique properties. Compared with microwave and millimeter waves, terahertz waves have the characteristics of high frequency and short wavelength. Therefore, terahertz waves have stronger beam directivity, higher resolution, and larger information capacity, and electronic equipment can be made smaller. Compared with light waves, terahertz waves are more penetrating and can be used in environments such as rain, fog, and smoke-filled battlefields, and have all-weather working capabilities; terahertz wa...

Claims

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