Remote multi-ATE semiconductor test equipment synchronization method and system and test method

Abstract

The invention provides a remote multi-ATE semiconductor test equipment synchronization method and system and a test method. The synchronization method comprises the following steps: a clock sending device sends a clock coding signal embedded with a clock signal to a plurality of test equipment through a high-speed optical fiber; the test equipment receives the clock coding signal, recovers clocks, and adjusts the clocks of the test equipment to be consistent with the clock of the clock sending device according to a clock adjustment system; the clock sending device sends a trigger coding signal embedded with a trigger signal to the plurality of test equipment through the high-speed optical fiber; the test equipment receives the trigger coding signal and returns the trigger coding signal to the clock sending device through the high-speed optical fiber; and the clock sending device adjusts the time point of sending the trigger coding signal according to the time difference in receiving the trigger coding signal. According to the invention, a 25Gbps high-speed optical fiber is used for transmitting signals, so that high-precision and long-distance synchronous clock and synchronous target triggering among the plurality of semiconductor test equipment are realized, and the system has the characteristics of long synchronous distance, low cost and high precision.

Description

technical field [0001] The invention relates to the field of ATE semiconductor testing equipment, and specifically provides a synchronization method, system and testing method for long-distance multi-ATE semiconductor testing equipment. Background technique [0002] The development of many modern technologies is inseparable from the progress of testing technology, which is the source technology of information. With the development of the times, people's requirements for the accuracy of the obtained information are gradually increasing, and the simple independent test and centralized test can no longer meet the needs of modern test technology. [0003] ATE (Automatic Test Equipment) is automatic test equipment, which is a system for automatic testing of integrated circuits through computers and special equipment. ATE semiconductor test equipment is used to test the integrity of integrated circuit functions and performance, and is an important equipment to ensure the quality ...

AI Technical Summary

Problems solved by technology

In order to achieve this goal, the clock and trigger signal sources are usually sent to multiple test equipment through electrical signals in the current technology, so as to realize the clock synchronization and trigger synchronization between multiple test equipment; however, the electrical signal will be attenuated during the propagation process, When the test equipment is far away from the signal source, the electrical signal attenuation is serious, and the signal quality and integrity are poor, so it is not suitable for transmission to multiple long-distance semiconductor test equipment

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