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Vertical three-dimensional nano gas sensor with micro heater and preparation method thereof

A gas sensor, three-dimensional nanotechnology, applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of poor selectivity, high power consumption, etc., and achieve the effects of reducing heat loss, high specific surface area, and reducing operating temperature

Pending Publication Date: 2021-07-09
HKUST SHENZHEN RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Most MOX sensors currently on the market have the disadvantages of high power consumption and poor selectivity
Most of the sensors are planar two-dimensional thin film structures and need to operate at high temperatures (300°C-400°C). The adsorption capacity between the target gas and the target gas is activated by heating to improve the response sensitivity to the gas, which makes them unsuitable for Low Power Application Scenarios

Method used

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  • Vertical three-dimensional nano gas sensor with micro heater and preparation method thereof
  • Vertical three-dimensional nano gas sensor with micro heater and preparation method thereof
  • Vertical three-dimensional nano gas sensor with micro heater and preparation method thereof

Examples

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Effect test

Embodiment 1

[0036] This embodiment provides a vertical three-dimensional nano-gas sensor with a micro-heater, the vertical nano-gas sensor includes: a housing and a heating-type gas sensing component packaged inside the housing, wherein the housing is preferably For the ceramic shell. see figure 1 , the heating type gas sensing component includes: up and down through-hole nanotubes 2, sensing electrodes, an insulating layer 4 and a micro heater 5.

[0037] Nanoscale gas-sensing materials are deposited on the inner wall of the upper and lower through-hole nanotubes 2, wherein the nanotubes 2 are preferably anodized aluminum nanotubes, the height is preferably 100nm-100μm, and the pore size is preferably 100nm-1μm; the gas-sensing material is preferably SnO 2 , of course, in other embodiments, the gas sensitive material can also choose TiO 2 , ZnO and other metal oxides. The sensing electrodes include a top sensing electrode 1 grown on the upper surface of the upper and lower through-ho...

Embodiment 2

[0042] see figure 2 , this embodiment provides an array-type nano-gas sensor, the array-type nano-gas sensor includes a housing and a plurality of sets of heating-type gas sensing components described in Embodiment 1 packaged inside the housing, for future use Smart gas sensor arrays with machine learning algorithms provide the solution. figure 2 Eight nanometer gas sensors are integrated on a single chip.

Embodiment 3

[0044] see image 3 , the present embodiment provides a method for preparing a vertical three-dimensional nano gas sensor with a micro heater in embodiment 1 and embodiment 2, the method includes the following steps:

[0045]Step 301: Deposit nanoscale gas-sensing material on the inner wall of the up-and-down through-hole nanotube.

[0046] A specific cycle process can be as follows:

[0047] Use tetradimethylaminotin as the tin source, open the ALD tin source valve for 300ms, close the tin source pump valve, the tin source stays in the cavity for 30s, open the nitrogen pump valve to clean the cavity for 30s; open the ALD gaseous water source valve for 30ms, and close the gaseous water source Pump valve, gaseous water stays in the cavity for 30s, open the nitrogen pump valve to clean the cavity for 5s. SnO grown within such a cycle 2 The thickness is about 0.1 nm. 3-15nm SnO obtained through multiple cycles 2 After thin film, high temperature calcination in air.

[0048]...

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Abstract

The invention discloses a vertical three-dimensional nano gas sensor with a micro heater and a preparation method thereof The gas sensor comprises a shell and at least one set of heating type gas sensing assembly packaged in the shell. The heating type gas sensing assembly comprises an up-and-down through hole type nanotube, wherein a nano-scale gas sensitive material is deposited on the inner wall of the nanotube; a sensing electrode which comprises a top sensing electrode and a bottom sensing electrode which are grown on the upper surface and the lower surface of the up-and-down through hole type nanotube, wherein the top sensing electrode and the bottom sensing electrode are provided with vertically opposite parts, and the vertically opposite parts of the top sensing electrode and the bottom sensing electrode are marked as overlapped parts; an insulating layer which grows on the lower surface of the bottom sensing electrode; and a micro heater which grows on the lower surface of the insulating layer and comprises a heating electrode and a heating element electrically connected with the heating electrode, wherein the heating element is vertically opposite to the overlapped part vertically. According to the invention, gas sensitive response with higher performance under lower power consumption can be realized.

Description

technical field [0001] The invention relates to the field of nano gas sensors, in particular to a vertical three-dimensional nano gas sensor with a micro heater and a preparation method thereof. Background technique [0002] Gas sensors, especially resistive gas sensors based on metal oxide semiconductors (MOX), are widely used in production and living fields such as environmental pollution monitoring, dangerous gas leakage, and chemical detection. With the development of Internet of Things technology and the promotion of precision medical strategy, traditional MOX gas sensors have great application potential in emerging fields such as wearable portable devices, point-of-care diagnostic devices (POCT), smart cities, and smart homes, and are also facing many challenges. challenge. [0003] Most MOX sensors currently on the market have the disadvantages of high power consumption and poor selectivity. Most of the sensors are planar two-dimensional thin film structures and nee...

Claims

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Application Information

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IPC IPC(8): G01N27/12
CPCG01N27/127
Inventor 范智勇宋志龙汤雯颖陈卓
Owner HKUST SHENZHEN RES INST
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