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Biochip and manufacturing method thereof

A biochip and manufacturing method technology, applied in biochemical equipment and methods, biomass post-treatment, biomass pre-treatment, etc., can solve the problem of uneven bonding precision nano-channel structure, high precision and limited etching process Etching precision requirements and other issues

Active Publication Date: 2021-07-23
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are many insurmountable problems in the manufacture of ANA biochips using silicon technology. For example, the formation of nano-channels through the bonding of the cover plate and the silicon substrate will be limited by the accuracy of the bonding, resulting in uneven structure of the nano-channels.
Moreover, limited by the silicon wafer size of monocrystalline silicon, it is difficult to manufacture large-area ANA biochips
The etching process of silicon substrate requires high precision and difficult process, but limited by the requirements of etching precision of silicon substrate, the manufacturing method of ANA biochip made by silicon process cannot be applied to glass substrate that can be produced in a large area
Furthermore, the manufacturing cost of the EBL process is relatively high, resulting in a further increase in the production cost of the ANA biochip.

Method used

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  • Biochip and manufacturing method thereof

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Experimental program
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Effect test

Embodiment 1

[0076] Such as Figure 10 As shown, the driving unit in the ANA biochip is a pair of separated electrodes 41 (same as the first separated electrode and the second separated electrode above), and the ANA biochip also includes multiple sets of vertical driving electrodes 42 .

[0077] Specifically, the separation electrodes 41 are respectively arranged on the packaging cover plate 3 at the positions corresponding to the two ends of the nanochannel 21, that is, the positions on the packaging cover plate 3 corresponding to the first liquid storage structure 51 and the second liquid storage structure 52. One of the electrodes 41 is connected to the power supply voltage, and the other separation electrode 41 is grounded, so that an electric field force (i.e. the first driving force) directed from the first liquid storage structure 51 to the second liquid storage structure 52 is generated between the two separation electrodes, so as to The solutions with different biomolecules in the...

Embodiment 2

[0080] Such as Figure 11 As shown, the driving unit in the ANA biochip is a pair of separated electrodes 41 . The multiple micro-channels 22 are arranged obliquely relative to the multiple nano-channels 21 .

[0081] Specifically, a plurality of nano-channels 11 are arranged along the first direction S1, and a plurality of micro-channels 22 are arranged along the second direction S2, the second direction S2 is not parallel to the first direction S1, and the second direction S2 is not perpendicular to the first direction S1, that is, the angle between the extending direction of the micro-channel 22 and the extending direction of the nano-channel 21 is less than 90°. The separation electrodes 41 are respectively arranged on the packaging cover plate 3 corresponding to the two ends of the nanochannel 21, that is, the positions corresponding to the first liquid storage structure 51 and the second liquid storage structure 52 on the packaging cover plate 3, and the two separation ...

Embodiment 3

[0084] Such as Figure 12 As shown, the driving unit in the ANA biochip is a pair of separated electrodes 41 . The multiple micro-channels 22 are arranged obliquely relative to the multiple nano-channels 21, and different micro-channels 22 have different biological reaction reagents. In the following, the biomolecules are used as antigens, and the biological reaction reagents are used as antibody solutions for illustration.

[0085] Specifically, the separation electrodes 41 are respectively arranged on the packaging cover plate 3 at the positions corresponding to the two ends of the nanochannel 21, that is, the positions on the packaging cover plate 3 corresponding to the first liquid storage structure 51 and the second liquid storage structure 52. One of the electrodes 41 is connected to the power supply voltage, and the other separation electrode 41 is grounded, so that an electric field force (i.e. the first driving force) directed from the first liquid storage structure ...

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Abstract

The invention provides a biochip and a manufacturing method thereof, and belongs to the technical field of biological chips. The biochip provided by the invention comprises a guide layer, a channel layer, a packaging cover plate and a driving unit from bottom to top, the channel layer is internally provided with a plurality of nano channels extending along a first direction, the biochip further comprises a plurality of micron channels extending along a second direction, the micron channels are arranged on and communicate with the layer where the channel layer and / or the guide layer are located. Biomolecules are driven by the driving unit to move, and different biomolecules are separated through the nano channels and the micron channels. According to the biochip provided by the invention, the nano-channel is directly formed in the channel layer, and the nano channels can be formed without attaching the substrate to the cover plate, so that the structural uniformity of the nano channel can be ensured, and the manufacturing process of the biochip is simplified.

Description

technical field [0001] The invention belongs to the technical field of biochips, and in particular relates to a biochip and a manufacturing method thereof. Background technique [0002] Biomolecules with different sizes or charges will have different moving trajectories under the action of cross electric field or cross fluid force. The biomolecule separation chip based on Anisotropic Nanofilter Array (ANA) "Biochip") is a biochip that utilizes the differences in the movement trajectories of various biomolecules to simultaneously separate and purify various biomolecules. [0003] In the prior art, ANA biochips are usually made by silicon technology, that is, on a substrate made of silicon (Si), high-precision etching is performed using silicon tip array manufacturing technology (EBL) and exposure technology, so as to Interlaced micro-grooves and nano-grooves are formed on the substrate, and then the cover plate is used as the top of the nano-grooves and micro-grooves, and hi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01L3/00C12M1/00
CPCB01L3/502753B01L3/502707B01L2300/0861B01L2300/0645B01L2200/10B01L2200/027B01L2300/12C12M1/00B01L2200/025B01L2300/0896B01L2300/0819B01L2200/0652B01L2400/0421B01L2200/0631B01L2200/0621B01L2300/0864B01L2300/0887C23C14/04C23C14/34B01L2300/042
Inventor 马啸尘宁策袁广才谷新李正亮
Owner BOE TECH GRP CO LTD