Surface X-ray absorption spectrum measuring device

Abstract

The present invention relates to a surface X-ray absorption spectrum measurement device, comprising: an X-ray light tube configured to generate X-rays by electron bombardment of a target material; an X-ray collimation light tool group, wherein the focal point of the X-ray collimation light tool group is located at the central position of an X-ray generation area of the electron bombardment target material, and the X-ray collimation light tool group is configured to collect X-rays radiated by the X-ray light source and enable the X-rays with a specific energy range to be collimated into parallel light; a monochromator which is configured to adjust the collimated parallel light, so that the emitted monochromatic X-rays have different energies; and a chamber, wherein an electron detection device is arranged in the chamber, and the electron detection device is configured to achieve measurement of an X-ray absorption spectrum. Surface X-ray absorption spectrum measurement can be carried out in a laboratory, and the surface X-ray absorption spectrum measurement device is suitable for laboratory or field application of X-ray absorption near-edge spectrums and extended-edge X-ray fine spectrums.

Description

technical field [0001] The invention relates to a surface X-ray absorption spectrum measurement device, and relates to the technical field of X-ray absorption spectrum measurement. Background technique [0002] X-ray absorption spectroscopy is a widely used material characterization method, which is used for the detection of elements in materials and the characterization of atomic electronic states, coordination atom types, and coordination atom distances. important application. The X-ray absorption spectrum contains two types of characteristic information: (1) The edge of the absorption spectrum, which is characterized by a large change in the absorption rate in a narrow energy range (about 100eV), and the mechanism is that the inner shell electrons in the X-ray The position of the absorption peak is closely related to the unoccupied energy level and electronic configuration of the atom. This part of the spectrum is usually called the near-edge X-ray absorption spectrum (X...

AI Technical Summary

Problems solved by technology

However, synchrotron radiation sources are large and expensive, often occupying acres of land, and are only available in a limited number of locations

The X-ray absorption measurement system disclosed in the prior art adopts the measurement methods of the perspective mode and the fluorescence mode. Since the X-ray penetration depth is relatively deep, the detected X-ray absorption spectrum is all bulk phase information, that is, the information of the whole sample, while It is impossible to detect the information of the surface interface of the sample, and according to the interaction between X-rays and the sample, the electron escape depth on the surface is generally less than 5nm

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