Pixelized terahertz spectrum sensing chip and preparation method thereof
A sensor chip, terahertz technology, applied in the field of terahertz spectrum detection, can solve the problems of insufficient working frequency band and applicable range, bulky instrument, long test time, etc., and achieves suitable for mass production, high sensitivity detection, low cost Effect
Inactive Publication Date: 2021-08-10
NANJING UNIV
View PDF16 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
The traditional terahertz time-domain spectroscopy technology is widely used in the detection of terahertz spectroscopy of biomolecules. It has the advantages of high signal-to-noise ratio and high bandwidth, but its test time is long, the instrument is bulky and expensive
The terahertz metamaterial sensor devices that have emerged in recent years can improve the detection sensitivity by using the resonant structure, but it has shortcomings in the working frequency band and the scope of application.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0030] Below in conjunction with accompanying drawing and specific embodiment, further illustrate the present invention, should be understood that these embodiments are only for illustrating the present invention and are not intended to limit the scope of use of the present invention, after having read the present invention, those skilled in the art will understand each aspect of the present invention The modifications of all equivalent forms all fall within the scope defined by the appended claims of the present application.
[0031] 1. Design pixelated terahertz spectral sensor chip
[0032] When designing a pixelated terahertz spectral sensor chip, a high-resistance silicon wafer with a substrate of 500 μm and a side length of 1.5 cm×1.5 cm is selected, and a layer of thickness of 200 nm and a side length of 1.5 cm is covered on the high-resistance silicon wafer. The metamaterial structure is 8mm×8mm, and the metamaterial structure includes 16 pixels with different operatin...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
| Property | Measurement | Unit |
|---|---|---|
| thickness | aaaaa | aaaaa |
Login to View More
Abstract
The invention discloses a pixelated terahertz spectrum sensing chip and a preparation method thereof. The invention discloses a pixelated terahertz spectrum sensing chip, which comprises 16 pixels with different working frequency points, wherein each pixel is composed of metal plane resonator arrays with the same structure and different geometric dimensions. The invention discloses a manufacturing method of the spectrum sensing chip. The manufacturing method comprises the following steps of cleaning a substrate; carrying out double-layer photoresist spin coating; performing ultraviolet exposure and development; and depositing and stripping a metal film. The invention also discloses a method for biomolecule terahertz spectrum testing by using the spectrum sensing chip, which comprises the following steps of irradiating the broadband terahertz source on the chip loaded with a sample to be tested, capturing image information through the terahertz camera, and extracting terahertz spectrum information. According to the method, broadband and high-sensitivity spectrum detection in the terahertz frequency band is realized.
Description
technical field [0001] The invention relates to the technical field of terahertz spectrum detection, in particular to a method for preparing a pixelated terahertz spectrum sensor chip and a preparation method thereof, and a method for spectrum detection of biological samples. Background technique [0002] Terahertz spectral detection technology has shown great application prospects in biomedicine, non-destructive testing, security and other fields. In biomedical sensing applications, real-time, broadband, and highly sensitive terahertz spectral detection devices are crucial. The traditional terahertz time-domain spectroscopy technology is widely used in the detection of terahertz spectroscopy of biomolecules. It has the advantages of high signal-to-noise ratio and high bandwidth, but the test time is long, the instrument is bulky and expensive. The terahertz metamaterial sensor devices that have emerged in recent years can improve the detection sensitivity by using the reso...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/3586G01N21/01G06K19/06
CPCG01N21/3586G01N21/01G06K19/06028G01N2021/0112
Inventor 吴敬波王攀李春冯龙呈杜琛杨圣新张彩虹金飚兵陈健吴培亨
Owner NANJING UNIV