Micro electro mechanical system fluxgate geomagnetic tensor sensing chip

A technology of micro-electromechanical systems and fluxgate sensors, which is applied in the fields of magnetic field measurement using electromagnetic devices, magnetic field measurement using the principle of magnetic flux control, and magnetic sensor arrays, and can solve the problems of poor portability and poor practicability of fluxgate sensors. , to achieve the effect of improving measurement accuracy, high consistency and good stability

Active Publication Date: 2021-08-13
SHANGHAI JIAO TONG UNIV
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

Fluxgate sensors based on them are less portable and therefore less practical than MEMS technology

Method used

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  • Micro electro mechanical system fluxgate geomagnetic tensor sensing chip
  • Micro electro mechanical system fluxgate geomagnetic tensor sensing chip

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Embodiment Construction

[0028] The following describes several preferred embodiments of the present invention with reference to the accompanying drawings, so as to make the technical content clearer and easier to understand. The present invention can be embodied in many different forms of embodiments, and the protection scope of the present invention is not limited to the embodiments mentioned herein.

[0029] In the drawings, components with the same structure are denoted by the same numerals, and components with similar structures or functions are denoted by similar numerals. The size and thickness of each component shown in the drawings are shown arbitrarily, and the present invention does not limit the size and thickness of each component. In order to make the illustration clearer, the thickness of parts is appropriately exaggerated in some places in the drawings.

[0030] like figure 1 , the present embodiment provides a microelectromechanical system fluxgate geomagnetic tensor sensor chip bas...

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Abstract

The invention discloses a micro electro mechanical system fluxgate geomagnetic tensor sensing chip, which comprises a glass substrate, a planar micro electro mechanical system fluxgate sensing device array and a silicon support sheet, the sensing device array comprises five fluxgate sensing units which are respectively located at four vertexes and a central point of a cross-shaped structure, and each unit is composed of two vertical and orthogonal single-axis fluxgate sensing devices; the coaxial homodromous single-shaft fluxgate sensing devices in the sensing device array are symmetrically distributed in parallel relative to a central point, and the distances between the adjacent coaxial homodromous single-shaft fluxgate sensing devices are equal; and the sensing device array is fixed to the upper and lower surfaces of the silicon supporting sheet through silicon-glass bonding, and the fluxgate sensing units located on the upper and lower planes are in one-to-one parallel coincidence correspondence in the vertical direction. According to the invention, geomagnetic field tensor measurement can be effectively realized, the size of the fluxgate tensor instrument is greatly reduced, the measurement precision of the fluxgate tensor instrument is greatly improved, and wide practical application of a geomagnetic field tensor measurement technology is powerfully promoted.

Description

technical field [0001] The invention relates to the field of microelectromechanical systems, in particular to a microelectromechanical system fluxgate geomagnetic tensor sensor chip. Background technique [0002] The magnetic gradient tensor is the rate of change of the magnetic vector in different directions. Because the magnetic gradient tensor has strong anti-interference ability and has higher resolution and accuracy for the shape characteristics of the magnetic source, it can display the spatial geometry of the magnet to be tested more intuitively. information. Because the magnetic gradient tensor can reflect the gradient of surrounding objects, it has a very wide application prospect. It has excellent applicability in geological exploration, unexploded ordnance positioning, endoscopic medical treatment and obstacle avoidance navigation for the disabled. The fluxgate sensor is a vector magnetic field sensor based on a simple transformer effect, which has better practi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/02G01R33/022G01R33/04G01R33/10G01R33/00
CPCG01R33/0206G01R33/022G01R33/04G01R33/10G01R33/0017G01R33/0052G01R33/0094
Inventor 雷冲刘佳宁
Owner SHANGHAI JIAO TONG UNIV
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