Microlens array with double optical path isolation and preparation method thereof
A micro-lens array, lens array technology, applied in the direction of lenses, optics, optical components, etc., can solve the problems of large compound eyes of lens size and difficult assembly, and achieve the effect of improving efficiency, less equipment requirements, and improving capturing ability.
Active Publication Date: 2022-07-29
SHANGHAI JIAOTONG UNIV
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Problems solved by technology
Due to the limitation of 3D printing accuracy, the size of the lens designed by this method is larger than that of the compound eye in nature, and it also faces problems such as assembly difficulties.
Method used
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[0036] The present invention will be described in detail below with reference to specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that, for those skilled in the art, several modifications and improvements can be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0037] refer to figure 1As shown, it is a process flow diagram of a method for preparing a microlens array with double optical path isolation according to a preferred embodiment of the present invention, which is performed according to the following steps:
[0038] S1: Prepare a base mold with hemispherical convex structures arranged in an array on the surface:
[0039] Specifically: spin-coating the HMDS adhesive on the silicon wafer substrate 1 to enhance the adhesion between the photore...
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Abstract
The invention provides a microlens array with double optical path isolation and a preparation method thereof. The Parylene film as an isolation layer on the lower surface of the photoresist; a black photoresist layer arranged on the lower surface of the Parylene film, the black photoresist layer forms an isolation array, and the isolation array is located between two adjacent miniature fly-eye lenses, using The second layer of negative photoresist is arranged on the outer surface of the black photoresist layer to block the crosstalk between adjacent optical paths; the second layer of negative photoresist is used as the base; and the second layer of negative photoresist is filled in the isolation in the gap between the arrays and covered on the surface of the black photoresist layer. The invention utilizes micro-nano processing to prepare a black photoresist layer with the problem of blocking crosstalk between adjacent optical paths and a negative photoresist with self-writing ability, and realizes the performance of high-resolution imaging by double isolation of incident light .
Description
technical field [0001] The invention relates to the technical field of optical bionic compound eyes, in particular to a microlens array with double optical path isolation and a preparation method thereof. Background technique [0002] Eyes are one of the most important organs for natural creatures to perceive external information. The compound eyes of insects have the advantages of wide field of view, high sensitivity, and the ability to detect fast-moving targets, which has attracted widespread attention. There are two main types of compound eyes in nature. One is a juxtaposed compound eye that can avoid light crosstalk, and the other is a superimposed compound eye with high sensitivity. In juxtaposed compound eyes, each optical channel is optically isolated from adjacent optical channels to avoid contrast reduction caused by superimposed ghosting and stray light, so there is no crosstalk between each other. The lens and photoreceptor form a unit of microlenses. The opt...
Claims
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IPC IPC(8): G02B3/00
CPCG02B3/0006G02B3/0012
Inventor 杨斌翟玥琦路礼军刘景全
Owner SHANGHAI JIAOTONG UNIV