Gas-liquid dual-use thermal flow sensor and preparation method thereof
A thermal flow sensor technology, applied in liquid/fluid solid measurement, fluid velocity measurement, measurement flow/mass flow, etc., can solve the problem that thermal gas flow sensors cannot be used to detect liquid flow, complex preparation process, and large heat loss and other problems, to achieve the effect of being suitable for mass production, simple preparation process and low cost
Active Publication Date: 2022-07-22
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Problems solved by technology
[0006] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a gas-liquid dual-purpose thermal flow sensor and its preparation method to solve the problem that the existing thermal gas flow sensor cannot be used to detect liquid flow, and the existing The gas-liquid dual-purpose flow sensor has problems such as complex preparation process and large heat loss.
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[0049] The embodiments of the present invention are described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. When describing the embodiments of the present invention in detail, for the convenience of explanation, the cross-sectional views showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the protection scope of the present invention. In addition, the three-dimensional spatial dimensions of length, width and depth should be included in the act...
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Abstract
The invention provides a gas-liquid dual-purpose thermal flow sensor and a preparation method thereof. The sensor includes a single crystal substrate, an insulating medium film, a support column, a heating resistor, a thermistor and an environmental temperature measuring resistor. An insulating cavity is formed in the single crystal substrate, and the insulating medium film covers the insulating cavity. The heat medium film includes a silicon nitride layer; the support column is located in the heat insulating cavity, and one end is connected with the single crystal substrate, and the other end extends upward to connect with the heat insulating medium film; the heating resistor and the thermistor are located in the heat insulating medium On the upper surface of the film, the ambient temperature measuring resistor is located on the single crystal substrate outside the insulating dielectric film. With the improved structure and process design of the present invention, a silicon nitride layer with low stress and high strength is used as the insulating dielectric film, and several support columns are formed inside the heat insulating cavity, and one end of the support columns is fixed on the lower surface of the heat insulating cavity. Inside the substrate, the other end is connected with the lower surface of the insulating medium film, which improves the mechanical strength of the insulating medium film and enables it to resist the impact of liquid flow.
Description
technical field [0001] The invention belongs to the technical field of silicon micromechanical sensors, in particular to a gas-liquid dual-purpose thermal flow sensor and a preparation method thereof. Background technique [0002] With the rapid development of MEMS sensor structure design technology and silicon-based micromachining technology, MEMS thermal flow sensors based on silicon-based micromachining technology are widely used in aviation due to their advantages of small chip size, low fabrication cost and high performance. Aerospace, industrial process monitoring, biochemical medicine and other fields. Especially in recent years, with the miniaturization of analytical instruments or equipment in the fine chemical industry and biomedicine, traditional flow measurement devices are difficult to meet the requirements in terms of manufacturing cost, size and performance. Multi-fluid detection capability, high performance and low cost have become the future development tre...
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IPC IPC(8): G01F1/692B81B7/00B81B7/02B81C1/00
CPCG01F1/692B81B7/02B81B7/0016B81B7/0019B81C1/00325B81B2201/0292
Inventor 王家畴李昕欣
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI