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Preparation method of strengthened and toughened CrTiNiSiN nano composite coating

A nano-composite coating, strengthening and toughening technology, applied in the direction of coating, nanotechnology, metal material coating technology, etc., can solve the problems of poor interlayer interface quality and bonding force, interlayer peeling, failure, etc. The effect of interlayer interface quality and bonding force, improving load resistance and ensuring hardness value

Pending Publication Date: 2021-09-17
NANJING VOCATIONAL UNIV OF IND TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, Ni and Cu cannot form a compound phase with transition metal nitrides, so the quality and bonding force of the interlayer interface are poor, and it is easy to cause interlayer peeling and failure.

Method used

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  • Preparation method of strengthened and toughened CrTiNiSiN nano composite coating
  • Preparation method of strengthened and toughened CrTiNiSiN nano composite coating
  • Preparation method of strengthened and toughened CrTiNiSiN nano composite coating

Examples

Experimental program
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Effect test

Embodiment 1

[0032] The invention provides a method for preparing a toughened CrTiNiSiN nanocomposite coating, comprising the following steps:

[0033] 1) Carry out mirror polishing and ultrasonic cleaning to the base material;

[0034] Carry out mirror polishing and ultrasonic cleaning on the tungsten carbide sample substrate. The tungsten carbide sample substrate is mirror-polished on a metallographic polishing machine. First use w20 diamond powder and rough polishing canvas for rough polishing, and then use w2.5 diamond powder to match The fine polishing flannelette is used for fine polishing, and after the substrate is cleaned by fine polishing, ultrasonic cleaning is carried out in an alcohol solution for 20 minutes.

[0035] 2) The Ti target and the Cr target with a target material purity of 99.9% are installed on the DC target respectively, and the Si target and the CrNi target with a target material purity of 99.99% are installed on the radio frequency target, and the CrNi target i...

Embodiment 2

[0045] Using the same materials and methods as in Example 1, the difference from Example 1 is that in step 1) mirror polishing and ultrasonic cleaning of the substrate, ultrasonic cleaning was performed for 25 minutes; in step 2), the vacuum of the deposition chamber was pumped to 2.7×10 -3 Pa; Step 3) In the deposition of the transitional Cr layer, the working gas pressure in the deposition chamber is maintained at 0.12Pa, and the preparation temperature is at 200°C; in step 4) in the deposition of the CrN coating, the working gas pressure in the deposition chamber is maintained at 0.12Pa, and the preparation temperature is at 200°C; Step 5) In depositing the CrTiNiSiN coating, the pressure of the working gas in the deposition chamber is maintained at 0.12 Pa, the preparation temperature is at 200° C., and the power of the CrNi target is 800 W.

[0046] The cross-sectional morphology scanning electron microscope picture of the Cr / CrN / CrTiNiSiN multilayer nanocomposite coating...

Embodiment 3

[0050] Using the same materials and methods as in Example 1, the difference from Example 1 is that in step 1) mirror polishing and ultrasonic cleaning of the substrate, ultrasonic cleaning was performed for 30 minutes; in step 2), the vacuum of the deposition chamber was pumped to 3.0×10 -3 Pa; Step 3) In the deposition of the transitional Cr layer, the working gas pressure in the deposition chamber is maintained at 0.15Pa, and the preparation temperature is at 250°C; in step 4) in the deposition of the CrN coating, the working gas pressure in the deposition chamber is maintained at 0.15Pa, and the preparation temperature is at 250°C; Step 5) In depositing the CrTiNiSiN coating, the pressure of the working gas in the deposition chamber is maintained at 0.15 Pa, the preparation temperature is at 250° C., and the power of the CrNi target is 1200 W.

[0051] The Cr / CrN / CrTiNiSiN multilayer nano-composite coating cross-sectional morphology scanning electron microscope picture prep...

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Abstract

The invention discloses a preparation method of a strengthened and toughened CrTiNiSiN nano composite coating. The preparation method comprises the following steps that (1) mirror polishing and ultrasonic cleaning are carried out on a base material; (2) a Ti target and a Cr target are respectively installed on a direct current target, a Si target and a CrNi target are installed on a radio frequency target, the base material is clamped to a sample table, a sealing cover is sealed, the vacuum degree of a deposition cavity is changed, and the surface of the base material is bombarded by using argon ions for cleaning and decontaminating; (3) a transition Cr layer is deposited; (4) a CrN coating is deposited; and (5) a CrTiNiSiN coating is deposited. Stable transition of interlayer phases is achieved, and the interlayer interface quality and binding force are effectively improved; a gradient with gradually increased hardness is formed on the section, so that the overall loading resistance of the composite coating is effectively improved; and by optimizing the preparation process, the hardness value is effectively ensured on the premise of realizing toughening.

Description

technical field [0001] The invention relates to the field of film preparation, in particular to a method for preparing a toughened CrTiNiSiN nanocomposite coating. Background technique [0002] According to the Archard wear model V=K(PL) / H, the wear volume (V) of a material is inversely proportional to its hardness (H), so the synthesis of superhard (H>40GPa) coatings has become the goal that researchers have always pursued. However, when the hardness of the traditional homogeneous coating is increased, its toughness will be greatly reduced, and there will be an "inverted relationship" between strength and toughness. That is, the higher the hardness of the coating, the greater the brittleness and the lower its toughness, resulting in the lower its ability to resist crack propagation. The problem of poor toughness of the coating is gradually highlighted in the application. For example, in the application of friction and wear, erosion protection, etc., when cracks occur on...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/16C23C14/34B82Y40/00
CPCC23C14/0641C23C14/165C23C14/345C23C14/3464C23C14/0036B82Y40/00
Inventor 吴志威周滔
Owner NANJING VOCATIONAL UNIV OF IND TECH