Formation method of semiconductor structure and semiconductor structure
A semiconductor and stacked structure technology, which is applied in semiconductor devices, semiconductor/solid-state device manufacturing, transistors, etc., can solve the problems of poor lateral stability in the capacitor array area, and achieve the effects of improving electrical performance, increasing capacitance value, and improving stability
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[0044] The method for forming the semiconductor structure provided by the present invention and the specific implementation of the semiconductor structure will be described in detail below in conjunction with the accompanying drawings.
[0045] This specific embodiment provides a method for forming a semiconductor structure, with figure 1 It is a flowchart of a method for forming a semiconductor structure in a specific embodiment of the present invention, with Figures 2A-2P It is a schematic cross-sectional view of the main process in the process of forming the semiconductor structure according to the specific embodiment of the present invention. like figure 1 , Figure 2A-Figure 2P As shown, the method for forming a semiconductor structure provided in this specific embodiment includes the following steps:
[0046] Step S11, forming a stacked structure on the surface of a substrate, the substrate has capacitive contacts, and the stacked structure includes alternately stack...
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