Arc surface dust blocking tool and rotary target material thermal spraying device using the same

Abstract

The invention relates to the technical field of target material preparation, in particular to an arc surface dust blocking tool and a rotary target material thermal spraying device using the same. The rotary target material thermal spraying device using the arc surface dust blocking tool comprises a target material mounting position, an air outlet and an arc surface dust blocking tool, wherein the air outlet and the arc surface dust blocking tool are arranged on the same side, and the inner surface of an arc-shaped baffle of the arc-surface dust blocking tool right faces the target material mounting position. The arc surface dust blocking tool comprises a supporting rod, a mounting seat and arc-shaped baffles, wherein the mounting seat and the arc-shaped baffles are mounted at the tail end of the supporting rod, the inner surfaces of the baffles are connected with the mounting seat, the outer surfaces of the baffles are convex arc surfaces, a plurality of baffles are arranged, and the baffles are sequentially arranged around the mounting seat to form a dust blocking arc surface with the mounting seat as the center. The mounting seats and the baffles are mounted at the tail end of the supporting rod in a manner that the relative positions can be finely adjusted, so that the distances from the outer surfaces of the baffles to the supporting rod can be finely adjusted before dust is blocked; and when the arc surface dust blocking tool is used for spraying, the two ends of the target material are blocked to reduce dust, so that abnormities, such as cracking or poor compactness, of the end part of the target material are reduced, operation is simple, and mounting and adjusting are convenient.

Description

Technical field [0001] The present invention has created the field of preparation of the target, and in particular, to a curved shutter, a rotating target thermal spray apparatus for applying the dust collecting tool. Background technique [0002] The heat spray is to heat the coating material to the melt or semi-melt state by a variety of heat sources, and then atomize its atomization and high speed to the surface of the treated workpiece, which is often used in silicon target, silicon Preparation process of ceramic targets such as aluminum target and cerium oxide. [0003] Taking a rotating target as an example, the current thermal spray is in particular atmospheric spray, mostly used by the spray gun back and forth, and the workpiece is rotated at a certain speed to receive spraying, and there is a dust removal at the target end, and the thermal spray device is in the target. The sides are provided with extravasive air outlets that require dust from the side wall of the waste ...

AI Technical Summary

Problems solved by technology

For the ceramic target, due to its poor thermal conductivity, the dust-proof tooling protective cover at both ends of the target is easy to accumulate heat and overheat the end of the target, which will lead to cracking of the target to a certain extent.

On the other hand, the specification and size of the protective cover of the dust-proof tooling should match the thickness of the coating; when the thickness of the coating changes, the entire dust-proof tooling needs to be disassembled and replaced, which increases costs and reduces production efficiency

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