A micromechanical accelerometer based on pt symmetric resonator and its detection method
A technology of accelerometer and detection method, applied in the direction of speed/acceleration/shock measurement, measurement acceleration, instrument, etc., can solve the problems that have not been reported in the application, and achieve improved signal stability and accuracy, high sensitivity and precision, light weight effect
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[0031] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0032] The present invention relates to the structure of a micromechanical accelerometer based on a PT symmetric resonator such as figure 1 shown. The PT symmetric resonator includes a first resonator A1 and a second resonator A2 with the same mass and stiffness. The first resonator A1 and the second resonator A2 are symmetrically placed side by side in the horizontal direction. The mechanical coupling mechanism 121 forms a series connection; the first resonator A1 is composed of the first mass 101 and the elastic support beam 103, and the second resonator A2 is composed of the second mass 102 and the elastic support beam 104; the two identically sensitive The mass blocks, that is, the first mass block 101 and the second mass block 102 are placed symmetrically in the horizontal direction; the first elastic support beam 103 and the seco...
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