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A micromechanical accelerometer based on pt symmetric resonator and its detection method

A technology of accelerometer and detection method, applied in the direction of speed/acceleration/shock measurement, measurement acceleration, instrument, etc., can solve the problems that have not been reported in the application, and achieve improved signal stability and accuracy, high sensitivity and precision, light weight effect

Active Publication Date: 2022-08-02
SOUTHEAST UNIV
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  • Summary
  • Abstract
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  • Application Information

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Problems solved by technology

PT symmetry sensing has applications in optics, electricity, and acoustics, but its application in MEMS has not been reported

Method used

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  • A micromechanical accelerometer based on pt symmetric resonator and its detection method
  • A micromechanical accelerometer based on pt symmetric resonator and its detection method
  • A micromechanical accelerometer based on pt symmetric resonator and its detection method

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Embodiment Construction

[0031] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0032] The present invention relates to the structure of a micromechanical accelerometer based on a PT symmetric resonator such as figure 1 shown. The PT symmetric resonator includes a first resonator A1 and a second resonator A2 with the same mass and stiffness. The first resonator A1 and the second resonator A2 are symmetrically placed side by side in the horizontal direction. The mechanical coupling mechanism 121 forms a series connection; the first resonator A1 is composed of the first mass 101 and the elastic support beam 103, and the second resonator A2 is composed of the second mass 102 and the elastic support beam 104; the two identically sensitive The mass blocks, that is, the first mass block 101 and the second mass block 102 are placed symmetrically in the horizontal direction; the first elastic support beam 103 and the seco...

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Abstract

The invention discloses a micromechanical accelerometer based on a PT symmetrical resonator and a detection method thereof, wherein the PT symmetrical resonator is composed of two resonators with the same mass and rigidity, and the two resonators are connected by a mechanical coupling structure; A closed-loop self-excited driving circuit is connected between the two resonators to realize the self-driving of the PT symmetric resonator and adjust the damping of the resonator. The detection method uses the acceleration to be measured to perturb the stiffness of the PT symmetric resonator, and then changes the resonance frequency of the PT symmetric resonator. The unknown acceleration can be measured by measuring the resonant frequency splitting amount. The invention can realize the measurement of weak acceleration, and at the same time greatly improve the measurement sensitivity.

Description

technical field [0001] The invention relates to a micromechanical accelerometer based on a PT symmetrical resonator and a detection method thereof, belonging to the technical field of microelectronics and the technical field of sensors. Background technique [0002] Accelerometers are instruments that measure the linear acceleration of carriers, and are widely used in vibration detection, attitude control, motion recognition, state recording and other fields. Accelerometers based on Micro-Electro-Mechanical System (MEMS) have become the main development direction of accelerometers due to their advantages of low cost, small size, low power consumption, and strong shock resistance. With the development of science and technology, my country has a huge demand for high-performance MEMS accelerometers, and the sensitivity and accuracy of current MEMS accelerometers need to be further improved. [0003] In the past decades, singularity sensing in parity-time (PT) symmetric systems...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/097G01P15/125
CPCG01P15/097G01P15/125
Inventor 张曼娜王立峰黄庆安董蕾
Owner SOUTHEAST UNIV
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