Suspended polarization beam splitter applied to middle infrared band
A polarization beam splitter, infrared band technology, applied in instruments, light guides, optics, etc., can solve the problem of high absorption loss, and achieve the effects of low transmission loss, simple process and simple structure
Inactive Publication Date: 2021-10-29
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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However, the silicon dioxide substrate used in the SOI waveguide structure has a relatively high absorption loss in this band.
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[0023] Below in conjunction with specific embodiment, further illustrate the present invention. It should be understood that these examples are only used to illustrate the present invention and are not intended to limit the scope of the present invention. In addition, it should be understood that after reading the teachings of the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the scope defined by the appended claims of the present application.
[0024] Embodiments of the present invention relate to a suspended polarizing beam splitter applied in the mid-infrared band, such as figure 1 and figure 2 As shown, it includes a strip-shaped silicon waveguide and a sub-wavelength grating slab waveguide structure 4, the strip-shaped silicon waveguide includes a first waveguide 1, a second waveguide 2 and a third waveguide 3, and the sub-wavelength grating slab waveguide struc...
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Abstract
The invention relates to a suspended polarization beam splitter applied to the middle infrared band. The suspended polarization beam splitter comprises strip-shaped silicon waveguides and a sub-wavelength grating slab waveguide structure; the strip-shaped silicon waveguides comprise a first waveguide, a second waveguide and a third waveguide; the sub-wavelength grating slab waveguide structure serves as a supporting structure, and is used for supporting the first waveguide, the second waveguide and the third waveguide; the second waveguide is located between the first waveguide and the third waveguide and is coupled with the coupling area of the first waveguide and the coupling area of the third waveguide; the first end of the third waveguide serves as the input end of the suspended polarization beam splitter, and the second end of the third waveguide serves as the straight-through end of the suspended polarization beam splitter; and the second end of the first waveguide is used as the cross end of the suspended polarization beam splitter. The absorption loss of a silicon dioxide substrate can be reduced.
Description
technical field [0001] The invention relates to the technical field of integrated optoelectronic devices, in particular to a suspended polarization beam splitter applied in the mid-infrared band. Background technique [0002] Since most optical waveguide devices have strong polarization dependence, realizing on-chip polarization state modulation of silicon optical devices can reduce the complexity of system integration, and polarization beam splitting is a key issue in optical interconnection. With the "capacity shrinking" of the communication band, the operating wavelength of silicon optical devices is gradually expanding to the long-wave band, and the 3-5um band is an atmospheric transparent window, which has the prospect of realizing free-space optical communication. However, the silicon dioxide substrate used in the SOI waveguide structure has relatively high absorption loss in this band. Contents of the invention [0003] The technical problem to be solved by the pre...
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IPC IPC(8): G02B6/126G02B6/124G02B6/125
CPCG02B6/126G02B6/124G02B6/125
Inventor 王书晓蔡艳余明斌
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI