Design method of variable curvature optical integrator
A technology of an optical integrator and a design method, applied in the field of variable curvature optical integrator, can solve the problems of inconvenient installation and adjustment, high light energy loss rate, poor irradiation uniformity at the edge of the spot, etc., and achieves the improvement of performance and irradiation energy. Effect
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[0023] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0024] This embodiment provides a method for designing a variable curvature optical integrator, including the following specific steps:
[0025] S1, each small lens of variable curvature optical integrator 1 is designed as a square prism lens, the field lens group 7 is 25 small lenses of different thicknesses, and the projection lens group 9 ...
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