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Film coating thickness nondestructive measurement method based on grating laser ultrasonic sound spectrum

A coating thickness, laser ultrasonic technology, applied in the direction of using ultrasonic/sonic/infrasonic waves, measuring devices, instruments, etc., to achieve the effect of high precision and spatial resolution

Active Publication Date: 2021-11-02
XI AN JIAOTONG UNIV
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Problems solved by technology

This method avoids the signal confusion that may occur in the traditional ultrasonic method for thin film coatings, and effectively overcomes the surface blind area problem of the traditional ultrasonic method. Compared with the traditional ultrasonic detection method, this method is also completely non-contact and can be implemented in harsh environments such as high temperature. Advantages of working

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  • Film coating thickness nondestructive measurement method based on grating laser ultrasonic sound spectrum
  • Film coating thickness nondestructive measurement method based on grating laser ultrasonic sound spectrum
  • Film coating thickness nondestructive measurement method based on grating laser ultrasonic sound spectrum

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specific Embodiment approach

[0022] The specific embodiment of the invention includes the following steps:

[0023] Step 1: First, it is prepared to be the same as that of the film coating structure and material, and N test members having different coating thicknesses (numbers I = 1, 2, ..., N), using the above-described grating laser ultrasonic sound spectrum lossless measurement Methods Different test pieces are measured to obtain surface wave center frequency f of thin film coating test pieces at different thicknesses. i (i = 1, 2, ..., n), such as figure 2 Indicated;

[0024] Step 2: Anatomy and microscopic measurement of the N test pieces, obtaining its precise coating thickness H i (i = 1, 2, ..., n) data;

[0025] Step 3: Depending on the thickness of different coating i With the surface wave center frequency f i (i = 1, 2, ..., n), establish a fitting relationship curve between the surface wave center frequency F and the coating thickness H, as a measurement standard curve, such as image 3 Indicated; ...

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Abstract

The invention discloses a thin film coating thickness nondestructive measurement method based on a grating laser ultrasonic sound spectrum. The method comprises steps that a strong pulse laser beam is irradiated to a surface of a measured coating through an optical mask plate or a microarray lens to form periodically distributed tiny grating-shaped laser spots, and an ultrasonic surface wave with a fixed wavelength is excited in a measured region; due to the frequency dispersion characteristic of the ultrasonic surface wave in the multilayer medium, the change of the thickness of the coating can cause the change of the frequency of the excited surface wave, the laser ultrasonic detection unit is adopted to receive the generated ultrasonic surface wave signal near the excitation position, and the received signal is subjected to Fourier transform to obtain the center frequency of the signal; and finally, nondestructive measurement of the coating thickness is realized according to the monotonous relationship between the center frequency of the ultrasonic surface wave and the coating thickness.

Description

Technical field [0001] The present invention relates to a lossless measurement method of the thickness of the coating, and more particularly to a thin film coating thickness loss measurement method based on a grating laser ultrasonic sound spectrum. Background technique [0002] The coating is a solid-state continuous film structure that is sprayed on the surface of the substrate material to achieve protective, insulation, wear resistance, etc., which is widely used in high temperature structural components such as air engines, heavy gas turbines, which are deposited at a high temperature-resistant alloy substrate. The surface of the material, reducing the working temperature of the component, and extend its service life. In the process of manufacturing and long-term service, monitoring of coating thickness is indispensable. The thinning of the thickness of the coating is an important reason for the failure of coating. For aerospace engines, the thickness of the coating is genera...

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Application Information

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IPC IPC(8): G01B17/02
CPCG01B17/025
Inventor 裴翠祥钱程寇兴
Owner XI AN JIAOTONG UNIV
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