Miniature snapshot spectrometer

A spectrometer and miniature technology, used in instruments, scientific instruments, spectrum surveys, etc., can solve the problems of limited spectral resolution, reduced temporal resolution, low resolution, etc., to reduce packaging time and cost, shock resistance and poor reliability, The effect of reducing the difficulty of mutual alignment

Pending Publication Date: 2021-11-02
杭州纳境科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The spectroscopic type is based on optical path difference light. Although the resolution can usually be very high, its resolution will be largely limited by the size of the device. The smaller the size, the smaller the optical path difference and the lower the resolution; The type is usually based on a series of narrow-band filters to sample spectral information. Although the accumulation of spatial optical path difference is not required, an array type is required to meet the requirements of a certain spectral range, and the bandwidth of the filter limits the spectral resolution; while the Fourier Although leaf-type spectrometers can replace arrays with single-point detectors, they need to be scanned on a time scale, reducing time resolution

Method used

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Examples

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Embodiment 1

[0038] The substrate material of the angle filter 1 is a single crystal silicon circle with a thickness of about 1mm. A circular through-hole array is formed by deep silicon etching. The through-hole period is 20μm and the diameter is 16μm, which realizes the angle selection of the incident light within ~1°;

[0039] The band-selecting transparent medium substrate 9 of the spectrum-selective layer 2 is a 0.3 mm thick quartz wafer. Deposit a GSS film with a thickness of about 500nm on its back, use photolithography to generate 36 micro-nano structures 8 with different periods and transmission spectra, and photonic crystal arrays 10 on the photoresist, and use the dry etching process The structure is transferred to the GSS thin film layer to generate a nanoporous structure, and the target spectral response range is 450-750nm. The period of the photonic crystal nanohole is 300-600nm, the diameter is 100-300nm, the angle between the directions of the two periods is 30°-90°, and th...

Embodiment 2

[0046] The substrate material of the angle filter 1 is metal Al with a thickness of about 5 mm. A circular through-hole array is formed by wet etching. The through-hole period is 100 μm and the diameter is 80 μm, which realizes the angle selection of the incident light within ~1°;

[0047] The selective band transparent medium substrate 9 of the spectrum selective layer 2 is 0.5 mm thick CaF 2 substrate. A GSST film about 1 μm thick is deposited on its back, and 36 micro-nano structures 8 with different shapes and transmission spectra are formed on the photoresist by using ultraviolet lithography. The process transfers the structure to the GSST thin film layer to generate a metasurface structure, and the target spectral response range is 3.5-5 μm. The period of the metasurface structure is 2 μm, and the size of the structure is about 80 μm. Each group of different metasurfaces has a pitch of 100 um, which corresponds to the period of the through-hole structure of the upper a...

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Abstract

The invention discloses a miniature snapshot spectrometer. The spectrometer comprises an angle filter, a spectrum selection layer, a photosensitive surface and a reading circuit which are sequentially arranged from top to bottom. According to the invention, a wide-spectrum-angle filtering function is realized by using the high-aspect-ratio diaphragm array, and a micro-nano structure or band gap and refractive index adjustable thin film is constructed to realize specific spectrum transmission in the same plane. The light-sensitive surface is used for converting transmitted light of different spectrum selection layers into light current signals, and the light current signals collected by the light-sensitive surface are processed and output through a reading circuit or an external processing circuit. According to the invention, an ultra-small-size snapshot spectrograph can be realized, so that high-precision and large-spectral-range spectral analysis is realized, and the device can be suitable for various wavebands, so that different spectral analysis requirements are met.

Description

technical field [0001] The invention relates to a spectrum analysis device, in particular to a micro-snapshot spectrometer, which is aimed at ultra-small spectrometers required by the intelligent Internet of Things, mobile terminals, displays, and the like. Background technique [0002] Spectral analysis is widely used in food, biological component detection, environmental monitoring, etc. In addition to further improving the resolution and spectral range of spectral analysis, it also puts forward higher requirements for the miniaturization and high integration of devices, such as with The combination of smartphones, drones and wearable devices, and hyperspectral imaging, etc. [0003] It is difficult to implement a pixel-level spectrometer using traditional spectral analysis methods. Traditional spectral analysis is generally achieved by means of dispersion spectroscopy (such as gratings, arrayed waveguides), optical filters, and Fourier transform. The spectroscopic type ...

Claims

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Application Information

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IPC IPC(8): G01J3/28G01J3/02
CPCG01J3/2823G01J3/0205
Inventor 林宏焘马耀光李兰戴浩李钧颖
Owner 杭州纳境科技有限公司
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