Epitaxial wafer of deep ultraviolet light emitting diode with bipolar AlN template layer
A technology of light-emitting diodes and template layers, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of high material difficulty, low carrier recombination efficiency, poor luminous efficiency of deep ultraviolet light-emitting diodes, etc., to improve luminous efficiency, The effect of promoting radiative recombination
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[0035] In order to make the objects, technical solutions, and advantages of the present disclosure, the present disclosure will be further described in detail below with reference to the accompanying drawings.
[0036] figure 1 This is a schematic structural diagram of an epitaxial wafer of a deep ultraviolet light emitting diode having a bipolar AlN template layer disclosed embodiments. like figure 1 Shown, this epitaxial wafer comprises a substrate 10 and a substrate 10 are sequentially formed on the AlN template layer 20, n-type AlGaN layer 30, a multiple quantum well layer 40 and the p-type layer 50.
[0037] figure 2 It is a block diagram of an AlN template layer provided in the embodiment of the present disclosure. like figure 2 Shown, having a plurality of first regions 203 and a plurality of second polarity polarity areas 20 on the surface of the AlN template layer 204 away from the substrate 10, a first polarity and a second polarity region 203 region 204 alternately in...
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