Time-division driving and orthogonal force feedback closed-loop quartz gyroscope error suppression method
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- BEIJING INSTITUTE OF TECHNOLOGYGY
- Publication Date
- 2021-11-05
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Abstract
Description
technical field
[0001] The invention relates to a time-division driving and orthogonal force feedback closed-loop quartz gyroscope error suppression method, which belongs to the technical field of micromechanical inertial devices. Background technique
[0002] A gyroscope is an inertial sensitive device used to measure the rotational angular velocity of an object relative to inertial space. Due to its small size, light weight, low power consumption, low cost, and easy mass production, the micromechanical gyroscope is an important development direction in the gyroscope field and has received extensive attention.
[0003] Quartz tuning fork gyroscope is a typical representative of micromechanical gyroscope. Its working principle is the piezoelectric / inverse piezoelectric effect and Coriolis effect of quartz crystal, including driving and detecting two pairs of tuning forks. Driving electrodes are designed and manufactured on the driving tuning fork, and testing tuning fork Th...