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Method for detecting focus in femtosecond laser processing by using image sensor and application thereof

A femtosecond laser processing and image sensor technology, applied in the direction of using optical devices, instruments, measuring devices, etc., can solve the problems of indistinguishable electrical signal changes, large detection errors, etc., to achieve strong repeatability, good robustness, high precision effect

Active Publication Date: 2021-11-12
JILIN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, when the sample is tilted, the electrical signal changes due to defocus and reflection angle cannot be distinguished, resulting in large detection errors

Method used

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  • Method for detecting focus in femtosecond laser processing by using image sensor and application thereof
  • Method for detecting focus in femtosecond laser processing by using image sensor and application thereof
  • Method for detecting focus in femtosecond laser processing by using image sensor and application thereof

Examples

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Embodiment 1

[0034] Focus detection on the sapphire horizontal surface is performed with an image sensor.

[0035] By using a computer program to analyze the reflected light focus image obtained by the image sensor, the out-of-focus position and direction at this time are obtained. Then by moving the z-axis translation stage to move the laser focusing point to the sapphire surface accurately, the defocus problem in laser processing can be effectively solved.

[0036] A method for detecting focus in femtosecond laser processing using an image sensor, the specific steps are as follows:

[0037] (1) Reflection spot image acquisition: Using the properties of the polarization beam splitter prism, combined with a quarter-wave plate, the reflected light on the sapphire surface is separated for detection. The wavelength of the femtosecond laser used is 1030nm. The laser beam emitted by the femtosecond laser is expanded by the first concave lens L1 and the second convex lens L2, and the spot is ex...

Embodiment 2

[0052] The application of the focus detection method to the uniform processing of large-scale micro-nanostructures on inclined sapphire surfaces.

[0053] Select four positions on the inclined sapphire surface for focus detection by the focus detection method, and the z-axis coordinates of the four points on the sapphire surface that are square in the xy plane can be obtained, and the morphology of the inclined sapphire surface can be drawn through these coordinates. By improving the processing procedure, the focus during processing can be kept on the sapphire, and finally a large-sized uniform micro-nano structure can be obtained.

[0054] The focus detection method is applied to the uniform processing of large-scale micro-nano structures on the inclined sapphire surface. The specific steps are as follows:

[0055] Steps (1), (2) are the same as in Example 1.

[0056] (3) Draw the morphology of the sapphire slope:

[0057] Place the sapphire to be tested on the sample stage...

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Abstract

The invention discloses a method for detecting a focus in femtosecond laser processing by using an image sensor and application thereof, and belongs to the technical field of laser processing. The method comprises three steps: reflected spot image acquisition; calibrating the position of a focusing point relative to the sample; and detecting the position of the focus relative to the sample. The reflected light focusing image obtained by the image sensor is analyzed by using a computer program, the laser focus can be accurately detected, and the laser focus can be accurately moved to the surface of the sample by moving a z-axis displacement table, and the defocusing problem in laser processing can be effectively solved. Compared with an astigmatism method, an eccentric beam method, a Fourier method and other focus detection methods depending on a quadrant detector, the method has the advantages that the focus of the image sensor is used for detecting the inclined sample, better robustness is achieved, and the system is simple in structure, high in repeatability and high in precision.

Description

technical field [0001] The invention belongs to the technical field of laser processing, and in particular relates to using an image sensor to detect the focal point in femtosecond laser processing, to solve the defocus problem in the femtosecond laser processing process, and to carry out the focused image of reflected light of a sample obtained by the image sensor by using a computer program. According to the analysis results, the precise detection of the focus position of the laser focus can be realized. Background technique [0002] Femtosecond laser processing technology is an advanced processing and manufacturing technology. Its high precision, three-dimensional processing capability, and no material selectivity make it widely used in many fields. However, due to the small focus size of the laser focus and the undulations on the surface of the sample, defocusing is easy to occur during processing, which seriously affects the processing effect. [0003] Previously, rese...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00G01B11/24
CPCG01B11/002G01B11/24
Inventor 陈岐岱徐思佳田振男孙洪波
Owner JILIN UNIV
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