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A method for detecting focus in femtosecond laser processing using image sensor and its application

A femtosecond laser processing, image sensor technology, applied in the direction of using optical devices, instruments, measuring devices, etc., can solve the problems of indistinguishable electrical signal changes, large detection errors, etc., to achieve strong repeatability, good robustness, high precision effect

Active Publication Date: 2022-06-03
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the sample is tilted, the electrical signal changes due to defocus and reflection angle cannot be distinguished, resulting in large detection errors

Method used

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  • A method for detecting focus in femtosecond laser processing using image sensor and its application
  • A method for detecting focus in femtosecond laser processing using image sensor and its application
  • A method for detecting focus in femtosecond laser processing using image sensor and its application

Examples

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Embodiment 1

[0034] Focus detection on the sapphire horizontal surface using an image sensor.

[0035] By using a computer program to analyze the focused image of the reflected light obtained by the image sensor, the defocus position and direction at this time are obtained. Then, by moving the z-axis stage, the focus of the laser can be accurately moved to the sapphire surface, which can effectively solve the problem of defocusing in laser processing.

[0036] A method for detecting focus in femtosecond laser processing using an image sensor, the specific steps are as follows:

[0037] (1) Reflected spot image acquisition: Using the properties of a polarizing beam splitter prism, combined with a quarter-wave plate, the reflected light from the sapphire surface is separated for detection. The wavelength of the femtosecond laser used is 1030nm. The laser light emitted by the femtosecond laser is expanded by the first concave lens L1 and the second convex lens L2, and the beam spot is enlarg...

Embodiment 2

[0052] The focal detection method is applied to the uniform processing of large-scale micro-nano structures on the inclined sapphire surface.

[0053] The focus detection method is used to select four positions on the inclined sapphire surface for focus detection, and the z-axis coordinates of the four points on the sapphire surface that are square in the xy plane can be obtained, and the topography of the inclined sapphire surface can be drawn through these coordinates. By improving the processing procedure, the focus during processing can be kept on the sapphire, and finally a large-sized uniform micro-nano structure can be obtained.

[0054] The focus detection method is applied to the uniform processing of large-scale micro-nano structures on the inclined sapphire surface. The specific steps are as follows:

[0055] Steps (1) and (2) are the same as in Example 1.

[0056] (3) Draw the topography of the sapphire slope:

[0057] Place the sapphire to be tested on the sampl...

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Abstract

The invention discloses a method for detecting focus in femtosecond laser processing by using an image sensor and its application, belonging to the technical field of laser processing, including reflection spot image acquisition; calibration of focus relative to sample position; detection of focus relative to sample position The first step is to use a computer program to analyze the reflected light focus image obtained by the image sensor, to achieve accurate detection of the laser focus, and then move the z-axis translation stage to move the laser focus to the sample surface accurately, which can effectively solve the laser problem. Defocus problem in processing. Compared with the astigmatism method, decentered beam method, Foucault method and other focus detection methods that rely on quadrant detectors, the present invention uses the image sensor focus to have better robustness for the detection of inclined samples, and the system structure is simple and repeatable strong and has high precision.

Description

technical field [0001] The invention belongs to the technical field of laser processing, and in particular relates to using an image sensor to detect the focus in femtosecond laser processing, to solve the problem of defocusing in the femtosecond laser processing process, and to use a computer program to perform a focused image of the sample reflected light obtained by the image sensor. According to the analysis results, the precise detection of the focus position of the laser can be realized. Background technique [0002] Femtosecond laser processing technology is an advanced manufacturing technology. Its high precision, three-dimensional processing capability, and no material selectivity make it widely used in many fields. However, due to the small size of the focal point of laser focusing and the fluctuation of the sample surface, defocusing phenomenon is easy to occur during processing, which seriously affects the processing effect. [0003] Earlier, the researchers est...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00G01B11/24
CPCG01B11/002G01B11/24
Inventor 陈岐岱徐思佳田振男孙洪波
Owner JILIN UNIV