Semiconductor coating equipment convenient to clean
A coating equipment and semiconductor technology, applied in the field of semiconductor coating equipment that is easy to clean, can solve the problems of reduced coating efficiency, inconsistent thickness, unfavorable semiconductor coating, etc., to achieve the effect of easy placement of materials
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[0029] see Figure 1-2 , in an embodiment of the present invention, a semiconductor coating device that is easy to clean includes a main processing box 1, a bottom pad 2 is fixedly bonded to the bottom surface of the main processing box 1, and a drawer groove is horizontally provided on one side of the main processing box 1 3. The inner side of the drawer groove 3 is plugged with a material storage box 4, and the top surface of the main processing box 1 is provided with an opening. The number of bottom pads 2 is four, and the four bottom pads 2 are fixed respectively. At the four corners of the bottom of the main processing box 1, four bottom pads 2 are made of hard rubber material, and the drawer groove 3 is horizontally opened on one side of the main processing box 1 near the bottom surface, and the inside of the drawer groove 3 Keep connected with the inside of the insulation layer 12, the side of the material storage box 4 is provided with a draw groove, and the material s...
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