Lower electrode assembly, installation method thereof and plasma processing device
A technology of electrode assembly and installation method, which is applied in the direction of electrode assembly manufacturing, electrical components, circuits, etc., can solve the problems that threaten the stability and safety of electrode assemblies, damage the peripheral components of the base, and arc discharge, etc., so as to reduce the possibility, The effect of reducing the size and ensuring the safety of use
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0036] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0037] figure 1 A schematic diagram of a capacitively coupled plasma processing device is shown, including a vacuumable reaction chamber 100 surrounded by an outer wall 10 . The reaction chamber 100 is used for processing the substrate 103 . The interior of the reaction chamber includes a lower electrode assembly, which is used to support t...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com