208 results about "Electric arc discharge" patented technology

The invention discloses a power transformer arc discharge multi-parameter detection simulation platform and a fault diagnosis method, and relates to the technical field of power system equipment state monitoring and fault diagnosis. The platform comprises a transformer body, a replaceable discharge module, a multi-parameter sensing unit and a signal processing and diagnosis module, and can truly reproduce various typical arc discharge faults of a needle plate, an air gap, a creeping surface, turn-to-turn and the like. The sensing unit is integrated with ultrahigh frequency and ultrasonic sensing probes, high-frequency current and voltage sensors, optical fiber temperature / pressure / strain sensors and the like, so that synchronous acquisition of multi-physical field signals is realized. According to the diagnosis method, through wavelet denoising and multi-dimensional feature extraction, a feature vector of multi-state parameter fusion in the process from partial discharge to arcing is constructed, and accurate classification of fault types is realized by using a support vector machine (SVM) model. The diagnosis method has high accuracy and early warning capability, effectively overcomes the limitation of single parameter diagnosis, and provides reliable technical support for transformer fault research and intelligent operation and maintenance.

The invention provides embedded metal fullerene and a preparation method thereof. The preparation method comprises the following steps: mixing a metal source and graphite powder, and filling a hollow graphite rod with the mixture to prepare an anode; the electrode is installed at the anode end of an electric arc furnace, and on-line activation is conducted through anode and cathode short-circuit current under the inert atmosphere; then carrying out arc discharge under specific air pressure and current, and collecting generated carbon ash; performing ultrasonic extraction by using an organic solvent to obtain a fullerene crude extracting solution; and finally, performing multi-stage separation and purification by high performance liquid chromatography, and performing primary and fine separation by sequentially adopting preparative and semi-preparative chromatographic columns to obtain a high-purity product. According to the method, a complete technical path capable of efficiently and controllably preparing the ultra-high-purity embedded metal fullerene is formed through a synthesis process integrating online activation and accurate atmosphere regulation and control and a multi-stage gradient chromatography purification strategy, and a solid foundation is laid for application of atomic-scale accurate materials in the frontier fields of quantum devices and the like.

The invention provides a directional ultra-short strong field electromagnetic pulse generation device, a plasma channel is formed through laser targeting gas and ultra-short strong field electromagnetic pulses are generated, the device comprises a high-power laser, a laser focusing module, a gas target module and a vacuum cavity, the high-power laser is used for generating femtosecond laser pulses and emitting the femtosecond laser pulses into the vacuum cavity; the laser focusing module is arranged in the vacuum cavity and is used for focusing femtosecond laser pulses generated by the high-power laser onto the gas target; the gas target module is arranged in the vacuum cavity and used for generating a high-density gas target and spraying the high-density gas target upwards, and a gas spraying opening of a gas target nozzle is located below the laser focus and can be adjusted in an electric control mode. According to the invention, escape electrons with charge quantity larger than that of a solid target and a low-density gas target can be generated, and laser forms arc discharge similar to thunder and lightning cloud in near-critical density plasma to generate EMP, so that electromagnetic radiation which is stronger than that of the solid target and far better than that of a common gas target can be generated.

The invention provides a spark discharge device and a spark discharge accurate control method, and relates to the technical field of spark discharge. The device comprises a pair of spark electrodes, a rotary switch, a capacitor and a power supply, wherein a gap exists between working ends of the spark electrodes; the spark electrode, the rotary switch and the capacitor are connected in series to form a discharging loop, and the capacitor and the power supply are connected in series to form a charging loop; the rotary switch comprises a rotatable rotor and a toothed bar connected with the rotor; a contact is arranged in the discharge loop, and when the contact is in contact with the toothed bar, the discharge loop is conducted. According to the invention, the discharge loop is rapidly switched on and switched off through the rotary switch, various parameters of spark discharge can be accurately and stably controlled, so that the spark discharge is not influenced by the environment, such as spark breakdown voltage, discharge frequency and the like, and the spark discharge can be prevented from being converted into corona, glow or arc discharge, for example, the spark discharge can be normally generated under low air pressure.

The invention discloses a fault detection method and system based on lightning protection device performance data, and relates to the technical field of fault detection, and the method comprises the steps: capturing the airflow velocity and airflow pressure deviation of a multi-crack outlet of a lightning protection device under the impact of a high lightning current in real time, and collecting the arc length data of an outlet point of the lightning protection device, and the temperature and instantaneous arc resistance of the thermocouple induction arc column are calculated. According to the method, the normalized airflow energy density and arc energy density features are combined into the joint feature sequence, so that the coupling relationship between the airflow performance and the arc discharge behavior of the lightning protection device can be captured, and the global detection state of slow evolution and instantaneous mutation of the equipment fault is realized; the lightning stroke threat intensity can be independently reflected by defining the dynamic risk index, lightning stroke threat propagation and topological network characteristics are combined in combination with lightning protection device performance detection data, and therefore transmission effect modeling of the lightning stroke dynamic risk is achieved.

A coating system for coating a substrate by an arc discharge comprises a target holder for holding a target; a substrate holder arranged along an emission axis behind the target holder for holding a substrate to be coated by the target; an anode for generating an arc discharge between the target holder and the anode, wherein the anode is arranged between the target holder and the substrate holder; an manipulation system arranged along the emission axis behind the anode, which is arranged to generate an electric and / or magnetic field for influencing a plasma propagating from the target holder along the emission axis by the arc discharge. A method for generating a plasma by an arc discharge and for manipulating the plasma by a magnetic field generated by one or more than one electromagnetic coil disposed along the emission axis behind the anode.

This invention provides an electrode device having a support for engaging and holding a graphite electrode used in the manufacture of a quartz crucible via arc discharge. The electrode device is characterized in that the outermost surface layer of the support, at the portion adjacent to the graphite electrode when the support is engaged with the graphite electrode, has an anti-fouling film. Thus, an electrode device is provided that can suppress contamination from the support, shorten the lifespan of the graphite electrode, and reduce manufacturing costs.

An example of a sliding contact strip capable of suppressing frequent arc discharges is disclosed. [Solution] The sliding contact strip 1 is provided with an insulating portion 4 on the sliding contact surface 3 that has a higher electrical resistance than the conductive portion (parts other than the insulating portion 4), and the insulating portion 4 is provided only on a portion of the sliding contact surface 3 in the width direction. Therefore, the occurrence of arc discharge between the trolley wire and the insulating portion 4 can be suppressed, and even if arc discharge occurs between the trolley wire and the conductive portion 5, the continuous and frequent occurrence of such arc discharge can be suppressed. Consequently, premature damage to the sliding contact strip 1 can be suppressed.

The invention provides a system and a method for removing charges in liquid medicine, which are applied to the technical field of semiconductors. According to the invention, a small-flow liquid medicine circulation pipeline is additionally arranged on a machine table pipeline at the front end of the liquid medicine nozzle, and the liquid medicine circulation pipeline is grounded, so that as long as one path is grounded, charges in the liquid medicine in all branches can be conducted away along the path; therefore, charges in all the liquid medicine in the machine pipeline can be conducted away, the problem that when the liquid medicine nozzle sprays liquid medicine to the surface of a wafer, instantaneous high potential difference is generated, arc discharge defects are formed, and a circuit fails is solved, and the reliability, the electrical performance and the yield of products are improved. In addition, the method is simple and efficient, and is suitable for various liquid medicines, so that the method has relatively high mass production applicability.

The invention discloses a low-temperature vacuum annular electron accelerator arc reactor, which relates to the field of electromagnetism and is applied to the technology and concept of energy generation, conversion and transmission. The device is composed of a high-voltage electron gun module (1), a low-temperature vacuum annular pipe module (2), a sealing module (3), an accelerating electric field module (4), a magnet guiding module (5), a magnetic core module (6), an induction coil output module (7) and a base module (8). According to the technology and the concept, a low-temperature vacuum annular electron accelerator is used for replacing a primary coil winding of a traditional transformer, that is, the same electric field is used for circularly accelerating electrons emitted into an annular vacuum tube by an electron gun to form annular electron flow to replace the primary coil winding of the traditional transformer. When the high-speed circling electrons lose to accelerate the action of an electric field, due to the mass inertia effect of the high-speed electrons, the annular current cannot disappear immediately under the guidance of the magnetic lines of force of the fixed magnet, the magnetic flux of the magnetic core still changes, and therefore the secondary coil can still obtain corresponding arc discharge. Therefore, the inductive discharge of the secondary coil can reversely act on the energy conversion of the accelerating electric field or the electron gun, so that the energy conversion efficiency is improved, and the energy loss is reduced.

The invention discloses a strong arc discharge transient impact measurement device. The device comprises a shielding box for realizing an electromagnetic shielding function; the box body and the cover plate are fixedly connected through flange turnups arranged on the periphery of the box body, and the cover plate is provided with a graphite copper sleeve. The force transmission pipe is inserted into the inner side of the graphite copper sleeve; the mounting base is a cylinder with a boss and is fixed on the inner surface of the bottom of the shielding box; the pressure sensor is sleeved on the boss of the mounting base; the insulator has an insulating property, so that insulation between the force transmission tube and the pressure sensor is realized; the shielding box is an electric conductor, and the flange flanging is connected with a loop of an external arc injection test facility; during test, an electric arc discharges between an electrode of the electric arc injection test facility and a to-be-tested piece to generate downward pressure, current flows into the shielding box from the to-be-tested piece, flows out of a flange flange of the shielding box and returns to the electric arc injection test facility, and the pressure is transmitted to the pressure sensor from the to-be-tested piece through the force transmission pipe and the insulator; the device is used for measuring the transient impact of strong arc discharge.

The invention relates to the technical field of power semiconductor device damage prediction, and particularly provides a silicon carbide material high-voltage breakdown arc three-dimensional reconstruction and damage prediction method, which comprises the following steps: S1, collecting time sequence data and synchronous spectrum data of arc discharge of a silicon carbide material in a high-voltage breakdown process, and carrying out pretreatment; s2, modeling an electric arc evolution process by adopting a space-time convolutional neural network, and reconstructing an electric arc three-dimensional space path and energy distribution; s3, carrying out association modeling on the space-time arc characteristics and the damage calibration data, and training to obtain a damage prediction model; and S4, acquiring time sequence data and synchronous spectrum data of arc discharge of the silicon carbide material in the high-voltage breakdown process, inputting the obtained space-time arc characteristics into the damage prediction model, and outputting a damage prediction result of the silicon carbide material. According to the method, nonlinear mapping is established between the arc spatial-temporal characteristics and the actual damage data, so that the damage indexes such as wafer surface ablation, crack formation and conductivity decline are predicted.

The invention discloses an intelligent monitoring system for a high-frequency grounding device of a journal sticking type axle engine, which comprises a hardware module, a remote monitoring cloud platform and a local intelligent monitoring unit, and is characterized in that the remote monitoring cloud platform is in wireless communication connection with the local intelligent monitoring unit, the local intelligent monitoring unit monitors the hardware module in real time, and the hardware module is in wireless communication connection with the remote monitoring cloud platform. The remote monitoring cloud platform comprises a big data analysis and fault engine module, and the big data analysis and fault engine module comprises a long-term trend analysis unit, a precision fault model diagnosis unit and an algorithm model optimization and parameter issuing unit; the system realizes real-time intelligent monitoring of the state of the high-frequency grounding device through multi-sensor information fusion and a hierarchical decision mechanism, not only can early identify faults such as carbon brush wear and arc discharge, but also can adapt to environmental changes, effectively reduce the false alarm rate, improve the suppression efficiency of shaft current, and improve the reliability of the high-frequency grounding device. Therefore, the service lives of the bearing and equipment are prolonged.

The utility model relates to the field of preparation of carbon nanotubes, and particularly discloses a reaction device of a high-performance multi-walled carbon nanotube, which comprises a sealed reaction box, an anode carbon rod, a cathode carbon rod, an anode carbon rod conveying device, a cathode carbon rod base and a scraper, the cathode carbon rod is mounted on the cathode carbon rod base, the cathode carbon rod base is positioned at the bottom of the inner side of the sealed reaction box, and the scraper is mounted on the anode carbon rod conveying device. The anode carbon rod conveying device comprises a conveying block, a first screw rod and an anode carbon rod fixing plate, the conveying block penetrates through the outer wall of the sealed reaction box, a conveying channel and a screw rod mounting channel are formed in the conveying block, one end of the first screw rod is rotationally connected into the screw rod mounting channel, and a connecting groove is formed between the conveying channel and the screw rod mounting channel; one side of the anode carbon rod fixing plate is in threaded connection with the first lead screw, the bottom of the anode carbon rod fixing plate is located in the conveying channel, an anode carbon rod is installed on the side face of the anode carbon rod fixing plate, and a sealing cover is arranged on the side, located outside the sealing reaction box, of the conveying block. The gap error between the anode carbon rod and the cathode carbon rod can be smaller, and the purity of the carbon nano tube after arc discharge is higher.

The present application relates to battery thermal management and functional fluid material technical field, especially to a kind of cooling liquid.It includes the following components by weight parts: base liquid 600-900 parts, 2-pyrrolidone 5-15 parts, ethylenediamine tetraacetic acid or its alkali metal salt 1-3 parts, polyepoxysuccinic acid 0.5-2 parts, PEO-PPO-PEO type block polyether dispersant 1.5-6 parts, 1-ethyl-3-methyl imidazole bis (trifluoromethyl sulfonate) imidazole 0.05-0.5 parts and glycidyl ether oxypropyl trimethoxysilane 0.1-1.5 parts;Wherein, the base liquid includes deionized water and ethylene glycol, propylene glycol or its combination.The present application realizes lower electrical conductivity by the synergistic design of cooling liquid component and ratio, while maintaining good thermal conductivity, which is conducive to improve electrical insulation safety and reduce arc discharge risk.

In a film formation apparatus and a film formation method using magnetron sputtering, high reproducibility is achieved even when a reactive film is formed by simultaneously introducing a plurality of types of reactive gases into a vacuum chamber. [Solution] In a magnetron sputtering apparatus (10) according to the present invention, the flow rate Qd of an inert gas introduced into a vacuum chamber (12) is kept constant, and the angle θ of a conductance valve (22) is kept constant, i.e., the effective pumping speed at an exhaust port (14) of the vacuum chamber (12) is kept constant. Additionally, the sputtering power Es, the arc discharge power Ed, and the substrate bias voltage Vb are kept constant. Furthermore, a gas flow rate ratio Rq, which is the ratio between the flow rates Qr1 and Qr2 of the reactive gases introduced into the vacuum chamber (12), is kept constant, and a total gas flow rate Qa, which is the sum of the flow rates Qr1 and Qr2 of the reactive gases, is controlled so that the pressure P inside the vacuum chamber (12) is kept constant.

The invention provides a preparation method of an AlN / Fe-C-C nanocapsule, and relates to the technical field of nanomaterials, a mixed molding target material containing Fe, Al and C is taken as an anode, a graphite electrode is taken as a cathode, and arc discharge is carried out by adopting a plasma arc evaporation process in the atmosphere of catalytic gas and working gas containing nitrogen, so that the AlN / Fe-C-C nanocapsule is prepared. The preparation method comprises the following steps: adopting a mixed molding target material containing Fe, Al and C as an anode to form an AlN / Fe-C-C nanocapsule with a graphene matrix; wherein the graphene can maintain the dielectric loss capability at a high frequency band, and the AlN / Fe-C-C takes AlN and Fe-C as a core and takes a carbon shell as a shell, so that good impedance matching can be realized, and the material has the dielectric loss capability at a low frequency band, thereby solving the problem of narrow wave-absorbing frequency band of the existing nanocapsule material.

The invention discloses a transformer oil tank mechanical strength testing device capable of controlling electric explosion, which comprises a high-voltage pulse forming loop, an arc discharge forming module, a measuring module, a defect detecting module and an intelligent control module, and is characterized in that the high-voltage pulse forming loop is connected with an electrode in the arc discharge forming module; the loading effect of high-voltage pulse on the electrodes is formed; the arc discharge forming module is used for simulating arc discharge faults in different forms in cooperation with high-voltage pulses; the measuring module is used for collecting electric signals and physical signals during testing and feeding back the electric signals and the physical signals to the intelligent control module; the defect detection module is used for detecting whether the transformer oil tank structure after simulation discharge is damaged or not and detecting the damage degree; the intelligent control module is used for coordinating and controlling all the modules and optimizing the transformer oil tank structure and the system of the intelligent control module.

Embodiments of the present disclosure are directed to an electro-hydrodynamic air mover apparatus that includes a pair of isolators, a collector electrode, an emitter electrode, and a pair of conductive metal terminals. Each end of the collector electrode and each end of the emitter electrode are attached to a respective isolator of the pair of isolators. Each conductive metal terminal is placed in a slot of the respective isolator and is electrically connected to the emitter electrode. Each conductive metal terminal is configured for applying a respective voltage of a power supply. A distance from the emitter electrode to the collector electrode along an outer surface of each isolator is equal to or greater than a threshold distance set to prevent an electrical arcing between the collector electrode and the emitter electrode.

The invention discloses a turn-to-turn arc severity lightweight discrimination system and method based on multiple physical quantities. The system comprises a multi-source signal acquisition and windowing module which is used for acquiring a multi-source physical signal of a multi-turn winding and dividing the multi-source physical signal into a plurality of sliding time windows; the full feature vector construction module is used for extracting multi-dimensional feature parameters from each physical signal for each sliding time window and splicing the multi-dimensional feature parameters into a full feature vector; the feature standardization and dimension reduction module is used for processing the full feature vector to obtain a multi-physical-quantity low-dimensional feature subset; the model training module is used for constructing and training a support vector machine discrimination model based on the multi-physical-quantity low-dimensional feature subset; and the lightweight discrimination module is used for completing lightweight discrimination of the arc discharge severity of the to-be-determined multi-source physical signal. The system has high identification accuracy and a stable discrimination result.

Various embodiments relate to a laser-excited arc discharge (214) for forming a layer by means of a target (112) which is exposed to the arc discharge (214) and comprises or consists of a ceramic, wherein the layer and / or the ceramic are electrically conductive.

The invention relates to the field of charging methods, and provides a charging gun arc prevention control method and system. The method comprises the following steps: in response to a charging request of a user, when the surface temperature of an insulating shell of a charging gun plug is lower than a preset temperature, judging whether an ice layer exists on the surface of the insulating shell; if the ice layer exists, acquiring ice layer thickness distribution information and ice layer density distribution information on the surface of the insulating shell; removing an ice layer on the surface of the insulating shell based on the ice layer thickness distribution information and the ice layer density distribution information; and when the surface humidity of the metal terminal of the charging gun plug is greater than the preset humidity, carrying out drying treatment on the surface of the metal terminal based on a preset drying method. The method is helpful for preventing the occurrence of an arc discharge phenomenon.

Provided are a ceramic substrate, a ceramic joined body, and a semiconductor device capable of suppressing arc discharge generation and further improving long-term reliability. In a ceramic substrate according to an embodiment, when an AC voltage of 50 Hz or 60 Hz is applied across the front surface and the back surface from 0 kV to 6 kV at a voltage ramp rate of 200 V / s, arc discharge is not detected. The dielectric breakdown voltage of the ceramic substrate is preferably 20 kV / mm or higher. In at least any observation region of 90 µm by 120 µm included in a given cross-section, the total number of first voids having a surface area of less than 0.1 µm2 and second voids having a surface area of 0.1 µm2 to less than 1 µm2 is preferably 29 or less, and the number of third voids having a surface area of 1 µm2 or more is preferably 0 to 3.

The invention discloses an arc-enhanced dielectric barrier discharge rapid deicing device and a use method thereof, and relates to the technical field of aircraft ice prevention and removal, the arc-enhanced dielectric barrier discharge rapid deicing device comprises a leading edge arc discharge exciter, an upper dielectric barrier discharge thermal film and an upper spanwise arc discharge exciter, a plurality of upper notches are formed in the upper dielectric barrier discharge thermal film, and a plurality of lower notches are formed in the lower dielectric barrier discharge thermal film; an upper film inner arc discharge exciter is arranged in the upper notch, a lower dielectric barrier discharge thermal film and a lower spanwise arc discharge exciter are further included, a plurality of lower notches are formed in the lower dielectric barrier discharge thermal film, and lower film inner arc discharge exciters are arranged in the lower notches. According to the device, a small cavity is generated in an ice layer in a short time through arc discharge, so that the upper dielectric barrier discharge thermal film and the lower dielectric barrier discharge thermal film directly enter a plasma rapid deicing stage, and the situation that a traditional dielectric barrier discharge exciter needs to slowly perform resistance hot ice melting due to the fact that the traditional dielectric barrier discharge exciter cannot be in contact with air in an initial stage is avoided; and the deicing speed is remarkably increased successfully.

A method and apparatus for identifying arc discharge patterns in short-gap oil of transformers are disclosed. The method involves conducting arc discharge experiments on oil-paper insulation based on different discharge defect models of oil-immersed power transformers; collecting multi-physical feature signals of short-gap oil arc discharge from the oil-paper insulation arc discharge experiments using sensors; processing the multi-physical feature signals using generalized S-transform to generate a multi-physical signal time-frequency spectrum; and inputting the generated multi-physical signal time-frequency spectrum into a multi-channel deep separable convolutional neural network model to achieve arc discharge pattern identification through joint detection of multiple physical quantities.

The utility model discloses a single wall carbon nanotube carbon gas pre pyrolysis device relates to single wall carbon nanotube's preparation method technical field. The single wall carbon nanotube carbon gas pre pyrolysis device, the air inlet of containing carbon gas is installed to the air inlet end of vacuum cavity, and the product outlet is fixedly installed to the exhaust end of vacuum cavity, and the product outlet is installed to the product collection container away from one end of vacuum cavity, and the scheme promotes preparation efficiency: on the basis of traditional chemical gas phase deposition method, increases the heater and arc discharge device, makes containing carbon gas decompose under the double action of high temperature and arc discharge, accelerates the speed that containing carbon gas and catalyst decompose for atom, compares with traditional method, under the same carbon base gas flow, can more, faster produce single wall carbon nanotube, and the preparation efficiency of single wall carbon nanotube is improved greatly, effectively solved the problem of low yield of high quality single wall carbon nanotube.

In the method for providing thermal energy, a plasma gas is fed into the area of ​​influence of at least one electric arc discharge (5) formed between two electrodes (18, 19) connected to an electric current source (10), thereby generating a plasma (1). The thermal energy of the plasma (1) is used to heat at least one thermal absorber (6), thus providing thermal energy for external use. A plasma gas composed of at least 10 vol% pure molecular hydrogen and a maximum of 90 vol% of at least one gas selected from nitrogen and a gas of group VIII of the periodic table is fed to the electric arc discharge (5).

This invention discloses a high-voltage insulation short-circuit device, belonging to the field of high-voltage discharge technology. The high-voltage insulation short-circuit device includes an insulating sleeve and grippers, and further includes: an electrical connection mechanism comprising a sliding sleeve, a first conductive post, and a conductive piston. The first conductive post is located at one end within the sliding sleeve, and the conductive piston is electrically connected to a ground wire. The inner cavity of the sliding sleeve between the conductive piston and the first conductive post is a vacuum-sealed cavity. One end of a second conductive post abuts against a terminal post, and the other end of the second conductive post can abut against the first conductive post. A locking mechanism is used to lock the position of the conductive piston. When the first conductive post contacts the second conductive post, the locking mechanism releases the locking of the conductive piston, and the conductive piston moves towards the side closer to the first conductive post until it abuts against the first conductive post. The high-voltage insulation short-circuit device of this invention can prevent the generation of an electric arc around the terminal post, thereby preventing the high temperature generated by the arc discharge from melting the terminal post or the short-circuit device.

The utility model discloses a shock wave balloon catheter which comprises a balloon, a shock wave generating part is arranged in the balloon, the shock wave generating part at least comprises two electrode assemblies, one end of the balloon is connected with an outer tube, an inner tube is arranged in the outer tube, the other end of the outer tube is connected with a catheter seat, and the outer side of the catheter seat is connected with a high-voltage pulse power supply. The shock wave generating part at least comprises two electrode assemblies, and the electrode assemblies are arranged on the inner pipe in a sleeving mode and are arranged at intervals; at least two discharge channels are arranged outside the inner tube, and all the discharge channels of all the electrode assemblies are not located on the same axial side of the inner tube. According to the shock wave balloon catheter, the electrode assembly is provided with the inner-layer electrode structure, the middle-layer electrode structure and the outer-layer electrode structure, the inner electrode is annular, the position of the discharge channel can be freely arranged, the discharge channel is arranged above the inner electrode, and the wire is located in the inner electrode, so that the wire cannot be damaged by arc discharge when shock waves are generated; and the service life of the inner shock wave conduit is greatly prolonged.

The present invention discloses a porous plug assembly, an electrostatic chuck, and a plasma etching apparatus. The porous plug assembly includes a porous plug body having a porous structure, in which gas enters from the bottom surface of the porous plug body, passes through the porous plug body, and exits from the top surface of the porous plug body. The porous plug assembly also includes an insulating dense layer having side portions and lateral portions, the side portions being formed on side walls of the porous plug body, and the lateral portions extending from tips of the lateral portions in at least one direction between a direction away from the porous plug body and a direction toward the porous plug body. The lateral portions reduce the risk of the adhesive layer being corroded by plasma. The porous plug assembly also reduces the discharge space and the risk of arcing. Furthermore, the porous plug assembly can effectively solve the problem of the adhesive layer clogging the porous plug body.