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Method for resetting coupling coefficient of directional coupler by using femtosecond laser secondary direct writing and application

A technology of directional coupler and femtosecond laser, which is applied in laser welding equipment, photoplate making process exposure devices, instruments, etc., can solve problems such as manufacturing errors, and achieve the goals of solving manufacturing errors, reducing power consumption, and improving chip integration Effect

Active Publication Date: 2021-12-10
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Aiming at the deficiencies of the prior art, the technical problem to be solved by the present invention is: to provide a method for resetting the coupling coefficient of the directional coupler by secondary direct writing with a femtosecond laser, so as to realize the restoration and redistribution of the initial beam splitting ratio of the directional coupler , so as to solve the manufacturing error problem in the process of using femtosecond laser to prepare directional coupler and integrated chip

Method used

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  • Method for resetting coupling coefficient of directional coupler by using femtosecond laser secondary direct writing and application
  • Method for resetting coupling coefficient of directional coupler by using femtosecond laser secondary direct writing and application
  • Method for resetting coupling coefficient of directional coupler by using femtosecond laser secondary direct writing and application

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Embodiment 1

[0039] The coupling distance is one of the important parameters affecting the coupling coefficient, and the modification of the coupling distance in the directional coupler can reset the coupling coefficient of the device. In the case of the same processing parameters, all basic properties such as the size and cross-sectional shape of the two coupling arms in the directional coupler are basically the same, and the coupling spacing of the device can be considered as the central axis spacing of the two waveguides. Therefore, the problem of resetting the coupling coefficients of a directional coupler can be considered as a problem of reconstructing the geometric center of the waveguide. Using the femtosecond laser secondary direct writing method, the second spliced ​​waveguide is directly written at the position where the central axis of the initial waveguide is very close, and the initial waveguide and the second spliced ​​waveguide will be fused into a new combined waveguide. S...

Embodiment 2

[0061] Embodiment 2 An application of using femtosecond laser secondary direct writing to reset the coupling coefficient of the directional coupler:

[0062] (1) Prepare the sample to be processed: Same as Example 1.

[0063] (2) Determining laser leveling power: Same as Embodiment 1.

[0064] (3) Leveling sample: same as embodiment 1.

[0065] (4) Determining the initial processing position: same as embodiment 1.

[0066] (5) Determining laser processing power: same as embodiment 1.

[0067] (6) Write the initial device directly for the first time:

[0068] The initial device is composed of a series of identical directional couplers with a fixed coupling length. The width of the directional couplers is 127 microns, the total length of the device is 25 cm, the radius of curvature of the turning area is 60 mm, and the initial coupling spacing is 8 microns. The device The direct writing speed is 60 millimeters per second; according to the variation trend of the beam splittin...

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Abstract

The invention discloses a method for resetting a coupling coefficient of a directional coupler by using femtosecond laser secondary direct writing and application, and belongs to the technical field of laser processing. The method comprises the following steps of cleaning a glass sample; building a laser processing light path and leveling a to-be-processed sample; and a femtosecond laser direct writing device is used. The method comprises the specific steps that firstly, an optical shutter is closed, and the glass sample is moved to an initial processing position; then a half-wave plate is rotated, and the laser power is adjusted; finally, software is operated to directly run a pre-written processing program, and secondary direct writing is respectively carried out in the processing areas of two waveguides in the coupling area, after processing is finished, polishing is carried out on the sample, and two new waveguides with the coupling distances different from those of the original waveguides are obtained; and the processing area is an area which is 0-3 microns away from the central axes of the original waveguides. According to the method, repair and redistribution of the initial split ratio of the directional coupler can be achieved, so that the problem of manufacturing errors in the process of preparing the directional coupler and an integrated chip by using femtosecond laser is solved.

Description

technical field [0001] The invention belongs to the technical field of laser processing, and specifically relates to modifying the coupling distance of a directional coupler in the first direct writing of the femtosecond laser by using the second direct writing of the femtosecond laser, so as to achieve the purpose of resetting the coupling coefficient of the initial directional coupler. By resetting the coupling coefficient of the initial device, the beam splitting ratio of the directional coupler is redistributed, which solves the inevitable manufacturing error problem in the process of using femtosecond laser to prepare photonic devices, and achieves basic unit devices and integrated chips. Manufacturing bug fix purposes. [0002] technical background [0003] In recent years, femtosecond laser direct writing technology has gradually become an important means of preparing photonic quantum integrated chips because of its true three-dimensional processing capability and the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/064B23K26/03G03F7/20
CPCB23K26/064B23K26/0643B23K26/0648B23K26/032G03F7/70383
Inventor 孙洪波余峰田振男陈岐岱
Owner JILIN UNIV
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